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UV 레이저를 이용한 다 층막의 선택적 직접가공 공정연구
정영모(Y. M. Jeong),안중용(J. Y. An),김두영(D. Y. Kim),백광열(K. Y. Baek),김종원(J. W. Kim),강형식(H. S. Kang),홍순국(S. K. Hong) 한국레이저가공학회 2007 한국레이저가공학회 학술대회 논문집 Vol.2007 No.-
A traditional SiNx pattern making processes require PR coating, exposure, develop, etching and PR strip. This causes high equipment cost, running cost and environment pollution. A selective layer direct patterning with mask projection method can be the good alternatives for those typical processes to overcome the above issues. The patterns on a small mask are projected onto a substrate by the almost homogenized beam of UV Excimer laser. This process can ablate only the selected layers clearly by the required depth. The experimental investigations are discussed for obtaining the optimal process condition to ablate selectively the multiple layers in this paper.
최적 구조설계를 위한 경사기능성 층상구조재료의 열, 기계적 특성 연구
조경목,남대근,백광열,이희태 대한금속재료학회(대한금속학회) 1998 대한금속·재료학회지 Vol.36 No.5
Analytical study on the thermomechanical deformation behavior of multilayered structures was performed. The solutuions for thermal strain, curvature change and internal stresses in response of temperature variation are derived by recourse of plate theory. The theory accounts for the effects on the thermomechanical characteristics due to the thermal mismatch between the constitute layers. The results are used to develope performance diagrams which enable the identification of possible geometrical combinations and compositional gradients for the optimal themomechanical behavior of multilayers. The resultant analytical solutions could be utilized for the optimal design of multilayered structures including functionally graded materials (FGM's). Aluminum/Stainless steel multilayer with and without compositional graded layer is used as a model system for the analysis of thermomechanical behavior.