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고농도 수소 검출을 위한 팔라듐 나노갭 가스 센서 플랫폼 개발
나경환(KyungHwan Na),황준호(JoonHo Hwang),이장현(JangHyun Lee),남구현(Koo Hyun Nam),임시형(Si-Hyung Lim) 대한기계학회 2016 대한기계학회 춘추학술대회 Vol.2016 No.12
This study demonstrates the development of a palladium nano gap based hydrogen sensor system. The nano gap was created on a single-crystal silicon wafer by controlled occurrences of cracking, and this simple process enable the construction of nanoscale sensor platform through easy and low-cost fabrication process. Location and size of nano gap could be precisely controlled on the silicon wafer by manipulating the residual stress of the deposited silicon nitride layer and the stress concentration of fabricated notches. The palladium layer expanding isotropically with an adsorption of hydrogen gas was deposited on the crack pattern, with the thickness of 40 nm. When the palladium with a nano gap was exposed to hydrogen gas, the change of electric current flow between nano gap was monitored. Nano gap hydrogen sensor shows a short response time of < ~15 s for the hydrogen concentration of > ~ 1%.