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고주파 마그네트론 스퍼터링에 의해 성막된 TiO<sub>2</sub>가 도핑된 ZnO 박막의 전기적 및 광학적 특성
김화민,손선영,Kim, Hwa-Min,Sohn, Sun-Young 한국전기전자재료학회 2009 전기전자재료학회논문지 Vol.22 No.10
$TiO_2$(2 wt.%)-doped ZnO(TZO) films with thickness from 100 nm to 500 nm were prepared on polyethylene naphthalate(PEN) substrate under various rf-power range from 40 W to 80 W. Their electrical and optical properties were investigated as a function of rf-power. We think that these properties were closely related with the crystallization and the film density of TZO films. It was also presumed that the vaporization of the water vapor and other adsorbed particles such as an organic solvents can affect the electrical properties of the conventional transparent conductive oxide(TCO) films. On the other hand, since the TZO film deposited on glass substrate at room temperature with rf-power of 80 W shows a very low resistivity of $7.5\times10^{-4}\;\Omega{\cdot}cm$ and a very excellent transmittance over an average 85% in the visible range, that is comparable to that of ITO films. Therefore, we expect that the TZO films can be used as transparent electrode for optoelectronic devices such as touch-panels, flat-panel displays, and thin-film solar cells.
플라스틱 기판의 Outgassing이 TCO 박막의 전기적 특성에 미치는 영향
김화민,지승훈,Kim, Hwa-Min,Ji, Seung-Hun 한국전기전자재료학회 2009 전기전자재료학회논문지 Vol.22 No.11
In this work, transparent conductive oxide(TCO) films such as $In_2O_3-SnO_2$(ITO) and $In_2O_3-ZnO$(IZO) were prepared on polyethylene naphthalene(PEN) and glass substrates by using rf-magnetron sputtering system. The TCO films deposited on PEN substrate show very poor conductivity as compared to that of the TCO films deposited on glass substrates. From the results of the residual gas analysis(RGA) test, this poor stability of plastic substrate is presumed to be caused by the deteriorated adhesion between the TCO films and the plastic substrate due to outgassing from the plastic substrate during deposition of TCO films. From our experiment, it is found that the vaporization of some defects in the plastic substrates deteriorate the adhesion of the TCO films to the plastic substrate, because the most plastic substrates containing the water vapor and/or other adsorbed particles such as organic solvents. Mixing of these gases vaporized in the sputtering process will also affect the electrical property of the deposited TCO films. Inorganic thin composite $(SiO_2)_{40}(ZnO)_{60}$ film as a gas barrier layer is coated on the PEN substrate to protecting the diffusion of vapors from the substrate, so that the TCO films with an improved quality can be obtained.
RF-Magnetron Sputtering 방법을 이용해 질소분압비에 따른 금속 PCB용 AlN 절연막의 특성
김화민,박정식,김동영,배강,손선영,Kim, Hwa-Min,Park, Jeong-Sik,Kim, Dong-Young,Bae, Kang,Sohn, Sun-Young 한국전기전자재료학회 2010 전기전자재료학회논문지 Vol.23 No.10
In this investigation, the effects of $N_2/(Ar+N_2)$ gas partial pressure on the structural, electrical, and thermal properties of AlN dielectric layers prepared on aluminum substrates using RF-magnetron sputtering method were analyzed. Among the films, the AlN dielectric film deposited under $N_2/(Ar+N_2)$ gas partial pressure of 75% exhibit the highest AlN (002) preferred orientation, which was grain size of about 15.32 nm and very dense structure. We suggest the possibilities of it's application as a dielectric layer for metal PCB because the AlN films prepared at optimized gas partial pressure can improving the insulating property, the thermal conductivity, and thermal diffusivity of the films.
고주파 마그네트론 스퍼터링 방법을 사용하여 유리 기판 위에 증착된 PTFE 박막의 발수 특성
김화민,김동영,Kim, Hwa-Min,Kim, Dong-Young 한국전기전자재료학회 2010 전기전자재료학회논문지 Vol.23 No.11
The polytetrafluoroethylene (PTFE) films are deposited on glass using conventional rf-magnetron sputtering method. Their hydrophobic properties are investigated for application as an anti-fouling coating layer on the screen of displays. It is found that the hydrophobicity of PTFE films largely depends on the sputtering conditions, such as Ar gas flow and deposition time during sputtering process. These conditions are closely related to the deposition rate or thickness of PTFE film. Thus, it is also found that the deposition rate or the film thickness affects sensitively the geometrical morphology formed on surface of the rf-spluttered PTFE films. In particular, the PTFE film with 1950 nm thickness deposited for 30 minute at rf-power 50 W shows a very excellent optical transmittance of over 90% and a good anti-fouling property and a good durability.
Ca Cell의 보호막으로 증착된 (SiO<sub>2</sub>)<sub>1-x</sub>(ZnO)<sub>x</sub> 무기 혼합 박막들의 투습 특성
김화민,류성원,손선영,Kim, Hwa-Min,Ryu, Sung-Won,Sohn, Sun-Young 한국전기전자재료학회 2009 전기전자재료학회논문지 Vol.22 No.3
We investigated the properties of inorganic diatomic films like silicon oxide ($SiO_2$) and zinc oxide (ZnO) and their composite films are packed as a passivation layer around Ca cells on glass substrates by using an electron-beam evaporation technique and rf-magnetron sputtering method. When these Ca cells are exposed to an ambient atmosphere, the water vapor penetrating through the passivation layers is adsorbed in the Ca cells, resulting in a gradual progress of transparency in the Ca cells, which can be represented by changes of the optical transmittance in the visible range. Compared with the saturation times for the Ca cells to become completely transparent in the atmosphere, the protection effects against permeation of water vapor are estimated for various passivation films. The thin composite films consist of$SiO_2$ and ZnO are found to show a superior protection effect from water vapor permeation compared with diatomic inorganic films like $SiO_2$ and ZnO. Also, this inorganic thin composite films are also found that their protection effect against permeation of water vapor can be significantly enhanced by choosing their suitable composition ratio and deposition method, in addition, the main factors affecting the permeation of water vapor through the oxide films are found to be the polarizability and the packing density.
고주파 마그네트론 스퍼터링 방법을 사용하여 Al 기판위에 증착된 PTFE 박막의 초-발수에 관한 특성 연구
배강,김화민,Bae, Kang,Kim, Hwa-Min 한국전기전자재료학회 2011 전기전자재료학회논문지 Vol.24 No.1
Super-hydrophobic properties have been achieved on the rf-sputtered polytetrafluoroethylene(PTFE) films deposited on etched aluminum surfaces. The microstructural evolution created after etching has been investigated by FESEM. The water contact angle over $160^{\circ}$ can be achieved on the rf-sputtered ultra-tihn PTFE film less than 10 nm coated on aluminum surface etched with 7 wt.%, 12.5 wt.%, and 15 wt.% HCl concentration for 12 min. XPS analysis have revealed the presence of a large quantity of $-CF_3$ and $-CF_2$ groups in the rf-sputtered PTFE films that effectively can reduce the surface energy of etched aluminum. The presence of patterned morphology along with the low surface energy at the rf-sputtered PTFE coating makes the aluminum surface with high super-hydrophobic property.
전자선 증착기술에 의해 성장된 다결정 CdSe 박막의 광학적 특성
김화민(Hwa-Min Kim) 한국진공학회(ASCT) 2000 Applied Science and Convergence Technology Vol.9 No.1
전자선 증착 기술에 의하여 유리기판 위에 성장된 다결정 CdSe 박막의 광학적 띠간격, 굴절률, 그리고 흡광계수와 같은 광학 상수들이 400~2,500 ㎚의 파장 영역에서 결정되었다. CdSe 박막들의 두께와 기판온도 변화에 따른 광학상수들의 변화를 설명하기 위하여 성장조건이 다른 CdSe 박막들에 대한 AFM상으로부터 표면 미세구조 매개변수들을 관측하였으며, 그 결과 광학상수들의 변화는 CdSe 박막의 표면 morphology 변화와 밀접한 관계가 있음을 보여준다. 박막 두께에 따른 광학적 띠간격의 감소는 결정립의 증기에 따른 양자 크기 효과와 관계가 있으며, CdSe 박막의 굴절률은 결정립이 증가함에 따라 감소한다. 그리고 CdSe 박막의 굴절률의 분산경향은 Sellmeier의 분산식에 의한 단순 진동자 모델을 따른다. The optical constants (E^d_g, n, K) of the polycrystalline CdSe thin films deposited on the glass substrate by the electron-beam evaporation techniqe are determined over 400~2,500 ㎚ photon wavelengths. In oder to explain the variation of the optical contants with film thickness and substrate temperatures, the surface microstructural parameter are investigated by AFM(atomic forced microscope) images for the films deposited by different growth conditions. It is shown that the variations of optical constants are close related to changes of the surface morphology of the CdSe thin films. The decrease in the band gap with film thickness is connected with quantum size effects due to increase of the grain size. The refractive index of CdSe films decrease with increasing the grain size of the films, and the dispersion of the refractive index followed a single oscillator model according to the Sellmeier formulation.