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$N_2O$ 플라즈마 열처리에 의한 저유전율 SiOF 박막의 물성 안정화
김윤해,이석규,김선우,김형준,Kim, Yoon-Hae,Lee, Seok-Kiu,Kim, Sun-Oo,Kim, Hyeong-Joon 한국재료학회 1998 한국재료학회지 Vol.8 No.4
플라즈마 화학기상증착법에 의해 증착된 저유전율 SiOF박막의 물성 안정화를 위하여 증착후 $N_2O$플라즈마로 열처리함으로써 그 특성을 평가하였다. SiOF박막은 대기방치 및 열처리에 불안정한 성질을 가진다. SiOF 박막은 박막내의 F-Si-F 결합의 존재 때문에 흡습현상이 발생하며, 박막내의 F함량이 증가함에 따라 수분 흡수가 증가한다. 또한 열처리를 거치면서 F이 탈착되어 박막내의 F함량이 감소한다. $N_2O$플라즈마 열처리는 표면에 얇은 SiON층을 형성시킴으로써 박막을 안정화시키는데 효과적이었다. 그러나 장시간의 N/sun 2/O플라즈마 열처리는 유전율을 크게 증가시킨다. 따라서 $N_2O$플라즈마 열처리에 의한 유전율의 증가없이 물성을 안정화 시키기 위해서는, 대기방치나 열처리에 의한 안정화 효과를 유지하면서 $N_2O$플라즈마 열처리에 의한 유전율의 증가를 최소화시킬 수 있는 공정의 확립이 필요하다. The stabilization of low dielectric constant SiOF films prepared by conventional PECVD using TEOS and $C_2F_6$ was evaluated by the $N_2O$-plasma post-deposition annealing. Properties of SiOF film became unstable when it was air-exposed or heat-treated. Water absorption of SiOF films was increased as F content was increased due to the for¬mation of F -Si- F bonds. Also F content of SiOF films decreased after heat treatment. $N_2O$-plasma post-deposition annealing was proved to be effective on stabilizing SiOF films. which was mainly due to the formation of thin SiON layer near the top surface of films. However. the value of dielectric constant was greatly increased again when $N_2O$-plasma post-deposition annealing was done for a long time. To stabilize the SiOF films without an increase of dielec¬tric constant by $N_2O$- plasma post-deposition annealing. the annealing time should be kept the minimum value. to which stabilizing effects against air environment and heat treatment were preserved.
김윤해(Yun-hae Kim),배창원(Chang-won Bae),김도완(Do-wan Kim),문경만(Kyung-man Moon),김동훈(Dong-hun Kim),조영대(Young-dae Jo),강병윤(Byung-yoon Kang) 대한기계학회 2009 大韓機械學會論文集A Vol.33 No.9
In this study, supercritical nano plating was performed to observe its effect on materials. Using supercritical carbon dioxide as a solvent, we observed how different pressures and temperatures of the supercritical fluid affected the process and its outcome. The plating current increases as pressure increases from 8 MPa to 16 MPa, but it decreases after that. Similarly, the plating current increases as temperature is increased from 35 ℃ to 45 ℃, but the current decreases after that. Also, the thickness of the wet electrolyte plating is about 35~50 ㎛, while the thickness of the plating done using supercritical fluid is about 20~25 ㎛. At the results, It to it is considered that supercritical nano plating enable to form more thin and stable plating than wet electroplating methods. Also both of the electroplating methods could be affected plating quality by surface condition, and the supercritical nano plating has been confirmed to product more uniform plating surface than wet electroplating.
MOCVD Bi₄Ti₃O₁₂ 박막의 실리콘 위에서의 증착기구 및 유기 금속원료의 펄스주입법에 의한 박막 특성 개선
이석규(Seok Kiu Lee),김준형(Joon Hyeong Kim),최두현(Doo Hyun Choi),황민욱(Min Wook Hwang),엄명윤(Myung Yoon Um),김윤해(Yoon Hae Kim),김진용(Jin Yong Kim),김형준(Hyeong Joon Kim) 한국진공학회(ASCT) 2000 Applied Science and Convergence Technology Vol.9 No.4
실리콘 기판 위에서 TiO₂와 Bi₂O₃의 박막 성장은 반응속도론 측면에서 커다란 차이를 보였지만, Bi₄Ti₃O₁₂ (BIT) 박막의 성장은 주로 TiO₂ 성장 거동에 의해 지배를 받았다. 그 결과, BIT 박막은 bismuth가 부족한 조성을 가지게 되었다. 박막 내에 부족한 bismuth의 양을 보충해 줌으로써 이러한 문제점을 해결하고자 펄스 주입 유기 금속 화학 기상 증착(MOCVD) 방법을 사용하였다. 이러한 펄스 주입법에 의해 bismuth의 양은 증가하였고 또한, 박막의 깊이 방향으로의 조성이 균일해졌고 Bi₄Ti₃O₁₂과 Si사이의 계면이 향상되었다. 게다가, Bi₄Ti₃O₁₂ 박막의 결정성은 크게 향상되었고 누설 전류 밀도는 연속 주입법에 비해 ½에서 ⅓정도 낮아졌다. 시계 방향의 C-V 이력 곡선이 관찰되었고 이로 인해 펄스 주입법에 의해 증착된 Bi₄Ti₃O₁₂ 박막은 강유전성에 의해 스위칭이 됨을 알 수 있었다. There was a great difference in the formation kinetics of TiO₂ and Bi₂O₃ on silicon, but the growth of bismuth titanate (BIT) thin film was mainly limited by the formation of TiO₂. As a result, the BIT film was easy to be lack of bismuth. The pulse injection metalorganic chemical vapor deposition (MOCVD) process was introduced in order to overcome this problem by recovering the insufficient bismuth content in the film. By this pulse injection method, bismuth content was increased and also the uniform in-depth composition of the film was attained with a abrupt Bi₄Ti₃O₁₂/Si interface. In addition, the crystallinity of Bi₄Ti₃O₁₂ thin film prepared by pulse injection process was greatly improved and the leakage current density was lowered by ½~⅓ of magnitude. Clockwise hysteresis of C-V was observed and the ferroelectric switching was confirmed for Bi₄Ti₃O₁₂ film deposited by pulse injection method.
에로전 실드의 접착특성에 미치는 접착 막의 흡습의 영향
김윤해(Yun-Hae Kim),윤성원(Sung-Won Yoon),안승준(Seung-Jun An),조영대(Young-Dae Jo),강병윤(Byong-Yun Kang),배창원(Chang-Won Bae) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.5
The properties of adhesive film are degraded by environmental factors such as moisture or salinity. From this reason, this paper has studied about the degradation of adhesion properties between blades and erosion shield for hovercraft by moisture absorption. We performed the test of adhesion properties after surface treatment on STS304 and A6061. Therefore, we could have known that adhesion properties were decreased about 50% because of produced crack inside of adhesive film by moisture absorption through observation of specimens that immersed for ten weeks.
탄소/현무암 섬유강화 하이브리드 복합재료의 성형과 기계적 특성 평가
이진우 ( Jin Woo Lee ),김윤해 ( Yun Hae Kim ),정민교 ( Min Kyo Jung ),윤성원 ( Sung Won Yoon ),박준무 ( Jun Mu Park ) 한국복합재료학회 2014 Composites research Vol.27 No.1
탄소섬유 복합재료는 내열성 및 우수한 기계적 특성을 가지고 있는 우수한 재료이지만 가격이 비싼 결점이 있다. 따라서 본 연구에서는 높은 기계적 강도를 가지며, 가격이 비싸지 않은 재료의 개발을 위해 탄소섬유에 현무암 섬유를 첨가하여 하이브리드 복합재료를 제작하였다. 현무암 섬유의 함유 비율이 높아질수록 강도는 감소하였으며, 탄소의 강화재 비율이 80% 정도에서 CFRP와 유사한 강도를 얻을 수 있었다. 또한 섬유 각각을 적층하여 복합재료를 제작하는 것 보다 섬유사를 혼합시켜 제작한 복합재료에서 더 우수한 기계적 특성을 얻을 수 있었다. Carbon Fiber Reinforced Plastic (CFRP) has strong and superb material properties, especially in mechanical and heat-resisting aspects, but the drawback is its high price. In this study, we made a hybrid composite using carbon fiber and basalt fiber, which is expected to attribute to its strong material properties and its financial benefits. We found out that the higher the content of basalt fiber included, the lower the intensity, and carbon`s intensity contents of 80% showed the similar intensity level as that of CFRP. Besides it was possible to get a better mechanical properties using the composite that included the mixed fiber, instead of using a composition of separate fibers filed.
강병윤(Byong- Yun Kang),손창석(Chang-Suk Son),문창권(Chang-Kwon Moon),남기우(Ki-Woo Nam),김윤해(Yoon Hae Kim) 한국해양공학회 2009 韓國海洋工學會誌 Vol.23 No.2
In order to export aircraft components or substructures, it is necessary to get a certification from the main company for the components or an airworthiness certification from the FAA. In Korea, those processes are performed by a small number of private companies for aircraft components. However, airworthiness certification has never been done in the company. To export an assembled aircraft, whether small or large, it is obigatory to get a certification for the aircraft being exported. Currently, the Korean government is trying to ge BASA agreements in a few years. For a mid-size company, it is easier to get the NADCAP audit process for the supply of aircraft components to the main company. In this paper, the overall process of aircraft certification is discussed and airworthiness certification is treated for export aircraft. NADCAP audit process is described in detail by introducing example parts made of coomposite material. This detailed process would be very helpful to a small or mid-size company that wants to develop and deliver aircraft components to foreign companies.
선박 해수배관에서 용접봉의 종류에 따라 직류 아크 용접한 용접부위의 부식특성에 관한 전기화학적 평가
이성열(Sung-Yul Lee),이규환(Kyu-Hwan Lee),원창욱(Chang-uk Won),나승수(Shane Na),윤영곤(Young-Gon Yoon),김윤해(Yun-Hae Kim),이명훈(Myeong-Hoon Lee),문경만(Kyung-Man Moon),김진경(Jin-Gyeong Kim) 한국해양공학회 2013 韓國海洋工學會誌 Vol.27 No.3
The seawater pipes in the engine rooms of ships are surrounded by severely corrosive environments caused by fast flowing seawater containing chloride ions, high conductivity, etc. Therefore, it has been reported that seawater leakage often occurs at a seawater pipe because of local corrosion. In addition, the leakage area is usually welded using shielded metal arc welding with various electrodes. In this study, when seawater pipes were welded with four types of electrodes(E4311, E4301, E4313, and E4316), the difference between the corrosion resistance values in their welding zones was investigated using an electrochemical method. Although the corrosion potential of a weld metal zone welded with the E4316 electrode showed the lowest value compared to the other electrodes, its corrosion resistance exhibited the best value compared to the other electrodes. In addition, a heat affected zone welded with the E4316 electrode also appeared to have the best corrosion resistance among the electrodes. Furthermore, the corrosion resistance of the weld metal zone and heat affected zone exhibited relatively better properties than that of the base metal zone in all of the cases welded with the four types of electrodes. Furthermore, the hardness values of all the weld metal zones were higher than the base metal zone.