원판형 분자 드래그펌프 다단 회전자에 대한 압력분포 측정

권명근,황영규,Kwon, Myoung-Keun,Hwang, Young-Kyu 한국진공학회 2009 Applied Science and Convergence Technology Vol.18 No.4

원판형 분자 드래그펌프 내부의 회전자 위치에 따른 압축 성능과 배기특성에 대하여 실험과 수치 해석적으로 고찰하였다. 실험은 각각의 회전자 위치에 진공압력 게이지들을 부착하여, 펌프의 출구 압력이 0.2 Pa에서 533 Pa 사이일 때, 각 회전자에서의 압력을 측정하였다. 압력측정범위는 출구 압력이 0.2 Pa에서 533 Pa 범위사이에서 측정하였다. 진공펌프 로터의 회전 속도는 24,000 rpm이며, 질소 가스를 사용하여 성능실험을 수행하였다. 본 연구에서는 원판의 단의 수에 따른 원판형 분자 드래그펌프의 성능특성을 파악하고자 하였다. 수치해석을 통해 내부 유동채널에 대한 구체적인 압력 분포를 파악하였으며, 수치해석의 신뢰도 파악을 위하여 실험 측정값과 수치해석 값을 비교하여 검증하였다. In this study is performed to investigate the pumping characteristics of three-stage disk-type molecular drag pump (DTDP). The experiments are measured using five vacuum pressure gauges in the positions for rotors of DTDP. The experimented DTDP is consisted of three rotors and four stator. In the DTDP, spiral channels of three rotors are cut on the both upper surface and lower surface of a rotating disk, and corresponding stator is a planar disk. The experiments are performed in the outlet pressure range of $0.2{\sim}533\;Pa$. The pressure of each rotors are measured under the various condition of outlet pressure and throughputs, and nitrogen gas is used for test gas. In the numerical study, the pumping characteristics of each rotor are studied for the variation of throughputs in the all rotating channel. Pressure contour and velocity are obtained by the numerical simulation.

분자드래그펌프 회전자와 고정자 사이 미세간극사이 희박기체유동해석

권명근(Kwon Myoung-Keun),황영규(Hwang Young-Kyu) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11

The pumping performance of a disk-type molecular drag pump (MDP) are studied for the variation of the channel depth and of the clearance between a rotor and stator by the three-dimensional direct simulation Monte Carlo (DSMC) method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a disk-type MDP rotor are cut on both the upper and lower sides of rotating disks, but the stationary disks are planar. To simplify the computational model and to shorten the calculation time, only one single flow channel is calculated. The full computational domain is linked by five regions including a radial clearance area between the rotor and casing wall, two regions of spiral channels on the upper and lower sides of the rotor, an inlet region of the pumping channel, and an outlet region of the pumping channel. Pressure density fields were obtained by the DSMC simulation in the rotor.

복합형 드래그펌프의 배기특성에 관한 실험적 연구

권명근(Myoung-Keun Kwon),이수용(Soo-Young Lee),황영규(Young-Kyu Hwang) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.8

복합형 분자펌프의 배기성능에 관한 실험적 연구

권명근(Myoung-Keun Kwon),이수용(Soo-Yong Lee),황영규(Young-Kyu Hwang) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11

The composite-type high vacuum pumps are widely used in the various processes. The pumping performance of composite-type molecular pumps has been investigated experimentally. The experimented pumps are a compound molecular pump (CMP) and hybrid molecular pump. The CMP consists with helical-type drag pump, at lower part, and with turbomolecular pump (TMP), at upper part. The HMP consists with disk-type drag pump, at lower part, and with TMP, at upper part. The experiments are performed in the outlet pressure of 0.2 ~ 533㎩. We have measured the ultimate pressure, compression ratio, and pumping speed.

원판형 드래그펌프 회전자의 채널이 성능에 미치는 영향에 관한 실험적 연구

권명근(Myoung-Keun KWON),이수용(Soo-Yong LEE),황영규(Young-Kyu HWANG) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.4

In this study, we are investigated experimentally the pumping characteristics about the pumping channel shapes of disk-type drag pump (DTDP). We are experimented the pumping performance about the rotors which have channel or do not exist. The channel disk-type rotor has spiral channels both upper and lower part, and stator is planar. The planar disk-type rotor hasn't channel and stator has spiral channels both upper and lower part. The flow-meter method is adopted to calculate the pumping speed. Compression ratio and pumping speeds for the nitrogen gas are measured under the inlet pressure range of 0.001 ~ 4 Torr. The maximum of compression ratio was about 3300 for three-stage DTDP (channel disk-type rotor), 1000 for four-stage (planar disk-type rotor) and two-stage DTDP (channel disk-type rotor) at zero throughput. The ultimate pressure was 1.6×10?? Torr for three-stage DTDP (channel disk-type rotor), 2.5×10?? Torr for four-stage DTDP (planar disk-type rotor).

분자드래그펌프 회전자와 고정자 사이의 간극에 대한 배기성능 예측

권명근(Myoung-keun Kwon),황영규(Young-kyu Hwang) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5

In this study, the pumping performance of a disk-type molecular drag pump ( DTDP ) are predicted for the variation of the various clearance between rotor and stator by the direct simulation Monte Carlo method in the molecular transition flow region. The shape of rotor has ten blades with an Archimedes' spiral profile. The vertical clearance between rotating rotor and stationary disk is 0.1, 0.3, 0.5 and 0.7 ㎜, and the radial clearance between rotor and casing wall is 0.5, 1.0 and 1.5 ㎜. We found that the vertical and radial clearance showed a significant effect on the pumping throughput.

고속 회전하는 원판형 드래그펌프 회전익과 고정익 사이 간극이 배기 성능에 미치는 영향

권명근(Myoung-Keun KWON),이수용(Soo-Yong LEE),황영규(Young-Kyu HWANG) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.11

The pumping characteristics of a single-stage disk-type drag pump ( DTDP ) are calculated, for the variation of the vertical clearance between a rotor and stator and of the racial clearance between a rotor and casing wall. by the three-dimensional direct simulation Monte Carlo (DSMC)method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a DTDP are cut on the both the upper and lower sides of a rotating disk, but the stationary disks are planar. As a consequence of results. the vertical and radial clearances have a significant effect on the pumping performance. Experiments are performed under the outlet pressure range of 0.4~533 Pa. When the numerical results are compared to the experimental data, the numerical results agree well qualitatively.

원판형 드래그펌프 채널형상의 성능에 미치는 영향

권명근(Myoung-Keun KWON),이승재(Seung-Jae LEE),황영규(Young-Kyu HWANG) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.11

The pumping characteristics of a disk-type drag pump (DTDP) from free molecular<br/> flow region to the slip flow region are calculated by the direct simulation Monte Carlo<br/> (DSMC) method. In this study, the pumping performance is studied numerically for<br/> several channel depths. The interaction between molecules is modeled by variable<br/> hard-sphere (VHS). The no time counter method is used as a collision sampling<br/> technique. The clearance between rotor and stator is considered an effect on<br/> performance. Spiral channels are cut on both upper and lower sides of rotating disks,<br/> and stationary disks are planar. A three-dimensional DSMC method for the analysis of<br/> steady rarefied flows in a single-stage DTDP has been developed. Velocity and density<br/> fields were obtained by the DSMC simulation in the rotor. The present experimental data<br/> in the outlet pressure range of 7.5×10-3 ~ 4 Torr were compared with the DSMC<br/> results in the single-stage DTDP. Comparison between the experimental data and DSMC<br/> results showed good agreement.

희박기체영역에서의 나선형 홈을 가진 원판형 드래그펌프의 배기속도에 관한 실험적 연구

권명근(Myoung-Keun Kwon),양성민(Seoung-Min Yang),이승재(Seung-Jae Lee),황영규(Young-Kyu Hwang),허중식(Joong-Sik Heo) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.4

Experimental investigations are performed for the rarefied gas flows in a disk-type drag pump<br/> (DTDP). The pump considered in this paper consists of grooved spiral channel on rotors and planar<br/> stators. The flow-metre method is adopted to calculate the pumping speed. Compression ratio and<br/> pumping speeds for the nitrogen gas are measured under the inlet pressure range of 0.001~4 Torr. The<br/> maximum of compression ratio was about 3300 for three-stage DTDP, 1000 for two-stage and 100 for<br/> single-stage DTDP at zero throughput. The number of stage influences the pumping speed of DPDT

단의 수에 따른 원판형 드래그펌프의 성능에 대한 설험적 연구

권명근(Myoung-Keun Kwon),허중식(Joong-Slk Heo),황영규(Young-Kyu Hwang) 대한기계학회 2002 대한기계학회 춘추학술대회 Vol.2002 No.5

Experimental investigations are performed for the rarefied gas flows in a disk-type drag pump. The pump considered in the present study consists of grooved rotors and stators. The flow-meter method is adopted to calculate the pumping speed. Compression ratios and pumping speeds for the nitrogen gas are measured under the outlet pressure range of 0.001~4 Torr. The present experimental data show the leak-limited value of the compression ratio in the molecular transition region.