원판형 분자 드래그펌프 다단 회전자에 대한 압력분포 측정

권명근,황영규,Kwon, Myoung-Keun,Hwang, Young-Kyu 한국진공학회 2009 Applied Science and Convergence Technology Vol.18 No.4

In this study is performed to investigate the pumping characteristics of three-stage disk-type molecular drag pump (DTDP). The experiments are measured using five vacuum pressure gauges in the positions for rotors of DTDP. The experimented DTDP is consisted of three rotors and four stator. In the DTDP, spiral channels of three rotors are cut on the both upper surface and lower surface of a rotating disk, and corresponding stator is a planar disk. The experiments are performed in the outlet pressure range of $0.2{\sim}533\;Pa$. The pressure of each rotors are measured under the various condition of outlet pressure and throughputs, and nitrogen gas is used for test gas. In the numerical study, the pumping characteristics of each rotor are studied for the variation of throughputs in the all rotating channel. Pressure contour and velocity are obtained by the numerical simulation.

분자드래그펌프 회전자와 고정자 사이 미세간극사이 희박기체유동해석

권명근(Kwon Myoung-Keun),황영규(Hwang Young-Kyu) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11

The pumping performance of a disk-type molecular drag pump (MDP) are studied for the variation of the channel depth and of the clearance between a rotor and stator by the three-dimensional direct simulation Monte Carlo (DSMC) method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a disk-type MDP rotor are cut on both the upper and lower sides of rotating disks, but the stationary disks are planar. To simplify the computational model and to shorten the calculation time, only one single flow channel is calculated. The full computational domain is linked by five regions including a radial clearance area between the rotor and casing wall, two regions of spiral channels on the upper and lower sides of the rotor, an inlet region of the pumping channel, and an outlet region of the pumping channel. Pressure density fields were obtained by the DSMC simulation in the rotor.

복합형 드래그펌프의 배기특성에 관한 실험적 연구

권명근(Myoung-Keun Kwon),이수용(Soo-Young Lee),황영규(Young-Kyu Hwang) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.8

원판형 분자드래그펌프의 회전익형 주위 진공압력 측정

권명근(Myoung-Keun Kwon),황영규(Young-Kyu Hwang) 한국유체기계학회 2006 유체기계 연구개발 발표회 논문집 Vol.- No.-

In this study, the pumping performance of a disk-type molecular drag pump (DMDP) are experimently studied. The DMDP consists with three spirally channeled rotors and planar four stators. Namely, spiral channels of the DMDP are cut on both the upper and lower surfaces of rotors, but the stationary stators are planar. The experiments are measured with pressure around the rotors of the DMDP. The experiments are performed in the outlet pressure range of 0.2 ~ 533 Pa. The inlet pressure and compression ratio are measured under the various conditions of outlet pressure and throughputs, and nitrogen is used the test gas.

원판형 드래그펌프 회전자의 채널이 성능에 미치는 영향에 관한 실험적 연구

권명근(Myoung-Keun KWON),이수용(Soo-Yong LEE),황영규(Young-Kyu HWANG) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.4

In this study, we are investigated experimentally the pumping characteristics about the pumping channel shapes of disk-type drag pump (DTDP). We are experimented the pumping performance about the rotors which have channel or do not exist. The channel disk-type rotor has spiral channels both upper and lower part, and stator is planar. The planar disk-type rotor hasn't channel and stator has spiral channels both upper and lower part. The flow-meter method is adopted to calculate the pumping speed. Compression ratio and pumping speeds for the nitrogen gas are measured under the inlet pressure range of 0.001 ~ 4 Torr. The maximum of compression ratio was about 3300 for three-stage DTDP (channel disk-type rotor), 1000 for four-stage (planar disk-type rotor) and two-stage DTDP (channel disk-type rotor) at zero throughput. The ultimate pressure was 1.6×10?? Torr for three-stage DTDP (channel disk-type rotor), 2.5×10?? Torr for four-stage DTDP (planar disk-type rotor).

분자드래그펌프 회전자와 고정자 사이의 간극에 대한 배기성능 예측

권명근(Myoung-keun Kwon),황영규(Young-kyu Hwang) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5

In this study, the pumping performance of a disk-type molecular drag pump ( DTDP ) are predicted for the variation of the various clearance between rotor and stator by the direct simulation Monte Carlo method in the molecular transition flow region. The shape of rotor has ten blades with an Archimedes' spiral profile. The vertical clearance between rotating rotor and stationary disk is 0.1, 0.3, 0.5 and 0.7 ㎜, and the radial clearance between rotor and casing wall is 0.5, 1.0 and 1.5 ㎜. We found that the vertical and radial clearance showed a significant effect on the pumping throughput.

고속 회전하는 원판형 드래그펌프 회전익과 고정익 사이 간극이 배기 성능에 미치는 영향

권명근(Myoung-Keun KWON),이수용(Soo-Yong LEE),황영규(Young-Kyu HWANG) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.11

The pumping characteristics of a single-stage disk-type drag pump ( DTDP ) are calculated, for the variation of the vertical clearance between a rotor and stator and of the racial clearance between a rotor and casing wall. by the three-dimensional direct simulation Monte Carlo (DSMC)method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a DTDP are cut on the both the upper and lower sides of a rotating disk, but the stationary disks are planar. As a consequence of results. the vertical and radial clearances have a significant effect on the pumping performance. Experiments are performed under the outlet pressure range of 0.4~533 Pa. When the numerical results are compared to the experimental data, the numerical results agree well qualitatively.

원판형 드래그펌프 채널형상의 성능에 미치는 영향

권명근(Myoung-Keun KWON),이승재(Seung-Jae LEE),황영규(Young-Kyu HWANG) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.11

The pumping characteristics of a disk-type drag pump (DTDP) from free molecular<br/> flow region to the slip flow region are calculated by the direct simulation Monte Carlo<br/> (DSMC) method. In this study, the pumping performance is studied numerically for<br/> several channel depths. The interaction between molecules is modeled by variable<br/> hard-sphere (VHS). The no time counter method is used as a collision sampling<br/> technique. The clearance between rotor and stator is considered an effect on<br/> performance. Spiral channels are cut on both upper and lower sides of rotating disks,<br/> and stationary disks are planar. A three-dimensional DSMC method for the analysis of<br/> steady rarefied flows in a single-stage DTDP has been developed. Velocity and density<br/> fields were obtained by the DSMC simulation in the rotor. The present experimental data<br/> in the outlet pressure range of 7.5×10-3 ~ 4 Torr were compared with the DSMC<br/> results in the single-stage DTDP. Comparison between the experimental data and DSMC<br/> results showed good agreement.

희박기체영역에서의 나선형 홈을 가진 원판형 드래그펌프의 배기속도에 관한 실험적 연구

권명근(Myoung-Keun Kwon),양성민(Seoung-Min Yang),이승재(Seung-Jae Lee),황영규(Young-Kyu Hwang),허중식(Joong-Sik Heo) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.4

Experimental investigations are performed for the rarefied gas flows in a disk-type drag pump<br/> (DTDP). The pump considered in this paper consists of grooved spiral channel on rotors and planar<br/> stators. The flow-metre method is adopted to calculate the pumping speed. Compression ratio and<br/> pumping speeds for the nitrogen gas are measured under the inlet pressure range of 0.001~4 Torr. The<br/> maximum of compression ratio was about 3300 for three-stage DTDP, 1000 for two-stage and 100 for<br/> single-stage DTDP at zero throughput. The number of stage influences the pumping speed of DPDT

단의 수에 따른 원판형 드래그펌프의 성능에 대한 설험적 연구

권명근(Myoung-Keun Kwon),허중식(Joong-Slk Heo),황영규(Young-Kyu Hwang) 대한기계학회 2002 대한기계학회 춘추학술대회 Vol.2002 No.5

Experimental investigations are performed for the rarefied gas flows in a disk-type drag pump. The pump considered in the present study consists of grooved rotors and stators. The flow-meter method is adopted to calculate the pumping speed. Compression ratios and pumping speeds for the nitrogen gas are measured under the outlet pressure range of 0.001~4 Torr. The present experimental data show the leak-limited value of the compression ratio in the molecular transition region.