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강대실(Daesil Kang),김무진(Moojin Kim),문원규(Wonkyu Moon) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
A Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) has been developed to measure displacements at high accuracy within a long measurement range. In this paper, we have worked on improving the performance and reliability of the sensor. The performance increase can be done by introducing the smaller electrode patterns of 4㎛ width. In order to improve the reliability of the sensor we have changed the electrode layers from chrome-gold to chrome-gold-chrome and re-design its supporting structure. The newly-designed sensor is fabricated and tested to show that its sensitivity is 35pF/㎛, which implies that its resolution may be 0.36㎚ if SNR (Signal-to-Noise-Ratio) is 80.1㏈. It is about ten times of that (3.14pF/㎛) of its previous version with 10㎛ electrodes. The total measurement range remains the same as the previous one; 15㎜. The calibration experiments show its improved performance and reliability.