http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
나노스템프 구동용 중공형 압전액추에이터 기본특성에 관한 연구
박중호(Jung-Ho Park),이후승(Hu-Seung Lee),이재종(Jae-Jong Lee),윤소남(So-Nam Yun),함영복(Young-Bog Ham),장성철(Sung-Cheol Jang) 대한기계학회 2011 大韓機械學會論文集A Vol.35 No.9
최근, MEMS/NEMS 기술을 이용하여 기능성 나노 구조물을 제작하기 위한 공정기술 중에, 마스터 스템프에 형성된 나노패턴을 웨이퍼 등에 복제할 수 있는 나노임프린트 리소그래피 기술이 활발히 연구되고 있다. 본 연구에서는 기존 멀티헤드방식 나노임프린팅 장비에서 사용되던 전동모터를 대신하여 플렉셔 메커니즘과 결합된 나노스템프를 구동하기 위한 사각 형상의 중공형 압전액추에이터를 설계, 제작하였으며, 제조공정이 다른 각각의 시제품의 변위, 발생력 및 응답특성에 관한 검토를 수행한다. 또한, 압전 액추에이터의 변위제어에 대한 제어수법을 간단히 소개하였으며, 제작한 프로토타입의 PI제어기에 의한 변위 제어결과를 소개한다. Nanoimprint lithography has been actively investigated. This method can replicate a nanopatterned master stamp onto a thin polymer film on a silicon substrate and so on. In this study, a square-shaped hollow piezoelectric actuator is presented, which is newly developed. This actuator is used for driving a nanoscale stamp in nanoimprint lithography instead of a conventional electric motor. The fabricated prototype actuator has 95 layers and side lengths of 23 ㎜ and 18 ㎜ for the outer and inner squares, respectively. By adopting a novel process instead of the conventional forming process for fabricating a one-layer actuator, the one-layer is composed of four rectangular segments produced by sawing a ceramic film with a thickness of 0.3 ㎜. The basic characteristics on displacement and generation force of the fabricated prototype actuator are experimentally investigated. Furthermore, the displacement characteristics obtained by using a PI controller are tested and discussed.
박중호(Jung-Ho Park),요시다 카즈히로(Kazuhiro Yoshida),요코타 신이치(Shinichi Yokota),함영복(Young-Bog Ham),윤소남(Sonam Yun) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.11
A novel piezoelectric micropump using active check valves in place of conventional passive check valves in inlet and outlet has<br/> been proposed and investigated. It actively controls open/close motion of check valves using piezoelectric actuator for<br/> expansion/contraction of pump chamber. In this paper, bi-directional flow characteristics and load characteristics are experimentally<br/> investigated using an adequate timing control for valve closing motion with a prototype micropump fabricated with the effective size<br/> of 17×8×11mm3. From the experimental results, it is ascertained that optimal values of phase shift against voltage to drive pump<br/> chamber for realization of a miniaturized but powerful micropump, are 15° in inlet check valve and 195° in outlet. Based on the<br/> obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A<br/> micropump with the effective size of 10×10×10mm3 is fabricated and basic characteristics are experimentally investigated.