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https://www.riss.kr/link?id=O37277969
2002년
eng
1078-8743
SCOPUS
학술저널
IEEE SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP
356-361 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
0780371585; 0780371593
Advanced semiconductor manufacturing conference
13th
Boston, MA
2002; Apr
0
상세조회0
다운로드
Invited: In-Line Electrical Characterization of Ultrathin Gate Dielectric Films
Alternative Smart-cut-like Process for Ultra-thin SOI Fabrication
A Manufacturable Shallow Trench Isolation Process for Sub-0.2um DRAM Technologies
Controlling Lithographic Imaging Performance at Sub-100 nm CD with Optical Measurements