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이 학술지의 논문 검색
Direct Observation of Single Bubble Cavitation Damage for MHz Cleaning
Tomita, H.; Inukai, M.; Umezawa, K.; Ji, L.N. Scitec Publications Ltd 2009 p.3-6
High Speed Imaging of 1 MHz Driven Microbubbles in Contact with a Rigid Wall
Zijlstra, A.; Janssens, T.; Wostyn, K.; Versluis, M.; Mertens, P.W.; Lohse, D. Scitec Publications Ltd 2009 p.7-10
Otto, A.; Nowak, T.; Mettin, R.; Holsteyns, F.; Lippert, A. Scitec Publications Ltd 2009 p.11-14
Impact of Megasonic Activation with Different Chemistries on Silicon Surface in Single Wafer Tool
Briend, G.; Besson, P.; Salvetat, T.; Petitdidier, S. Scitec Publications Ltd 2009 p.15-18
Impacts of Ionization Potentials and Megasonic Dispersion
Franklin, C. Scitec Publications Ltd 2009 p.19-22
The Influence of Standing Waves on Cleaning with a Megasonic Nozzle
Janssens, T.; Doumen, G.; Halder, S.; Wostyn, K.; Mertens, P.W.; Straka, J. Scitec Publications Ltd 2009 p.23-26
Megasonic Sweeping and Silicon Wafer Cleaning
Goodson, J.M.; Nagarajan, R. Scitec Publications Ltd 2009 p.27-30
Xu, K.; Pichler, S.; Wostyn, K.; Cado, G.; Springer, C.; Gale, G.W.; Dalmer, M.; Mertens, P.W.; Bearda, T.; Gaulhofer, E. Scitec Publications Ltd 2009 p.31-34
High Aspect Ratio Contact Clean Study in 58nm Flash Device
Yu, P.C.; Chen, C.K.; Lin, J.L.; Wu, C.N.; Matsuo, H. Scitec Publications Ltd 2009 p.35-38
High Velocity Aerosol Cleaning with Organic Solvents: Particle Removal and Substrate Damage
Andreas, M.T.; Wostyn, K.; Wada, M.; Janssens, T.; Kenis, K.; Bearda, T.; Mertens, P.W. Scitec Publications Ltd 2009 p.39-42