나노 임프린트 기술을 이용한 폴리머 도파로 기반의 브래그 격자형 파장 필터 = Polymeric Wavelength Filter Based on a Bragg Grating Using Nanoimprint Technique

다국어 초록 (Multilingual Abstract)

- A polymeric waveguidetype wavelength filter based on a Bragg grating has been proposed and fabricated using the simple nanoimprint technique, for the first time to our knowledge. An ultraviolet transparent stamp with the singlemode waveguide pattern incorporating a surfacerelieftype Bragg grating was specially designed selective dryetching process. Using this stamp, the device fabrication was substantially involving just a singlestep process of imprint followed by polymer spincoating. The achieved maximum reflection was higher than 25 dB at the center wavelength of 1569 nm. And the 3dB bandwidth was 0.8 nm for the device length of 1.5 cm.

참고문헌 (Reference)

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