By developing a comprehensive computer modeling code, we have theoretically studied electron-beam-excited XeCl excimer laser. In this studied, we have analyzied XeCl?? formation channel, XeCl?? relaxation channel, and absorption channel at 308nm in up...
By developing a comprehensive computer modeling code, we have theoretically studied electron-beam-excited XeCl excimer laser. In this studied, we have analyzied XeCl?? formation channel, XeCl?? relaxation channel, and absorption channel at 308nm in upper laser level. It could be use of computer modeling which is constucted kinetic rate equation. Also we have invstigated intrinsic efficiency, photon extraction efficiency, formation efficiency of XeCl laser as a function of HCl halogen donor which intensively affects laser output.