Nanocrystalline/microcrystalline diamond (NCD/MCD) multilayer film with high sp3 bonded carbon concentration and smooth surface has been successfully deposited on silicon substrate. Optimized deposition parameters based on substrate temperature modula...
Nanocrystalline/microcrystalline diamond (NCD/MCD) multilayer film with high sp3 bonded carbon concentration and smooth surface has been successfully deposited on silicon substrate. Optimized deposition parameters based on substrate temperature modulation were adopted to grow
the NCD/MCD film.
The nanocrystallinity, purity and the multilayer structure were characterized
by Raman spectroscopy, X-ray diffraction (XRD) and scanning electron microscopy (SEM).
The smoothness of the film surface was shown by surface profile measurements and further verified by its high optical transmittance from visible to infrared band. Therefore, this newly proposed
NCD/MCD multilayer film would have a variety of optical applications.