나노 금속 박막의 Cold-tribonanolithography에 대한 특성

다국어 초록 (Multilingual Abstract)

This paper demonstrates the characteristic of micro scale tribo-nanolithgraphy (TNL) machining on the surfaces of metallic thin films which have poor machinability in micro scale. TNL is one method of atomic force microscopy (AFM) lithography which is more effective fabrication technology, as compared to conventional photolithography due to its relatively simple process, high resolution, short processing time, and low cost. We propose ultra-precision machining at sub-0℃ temperatures using a lab-made micro polycrystalline diamond (PCD) tool on a retrofited piezo stage with a Peltier device. The workpiece, located on the stage, is cooled artificially, and a normal load of several mN is applied by the micro PCD tool for the micro scale cutting process. The machining results indicated considerably different machinability when the work was performed at sub-0℃, as opposed to the ambient surface temperature, due to the changed mechanical characteristics of surface by the forced cooling of the workpiece. Although the normal load, machining speed, and machining area remained constant, the width and depth of the patterns significantly increased at sub-0℃ temperature conditions.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. Cold-TNL
• 3. 실험 방법
• 4. 실험 결과
• 4. 결론
• 참고문헌