열산화 공정의 3차원적 산화층 성장 특성 분석과 시뮬레이션에 관한 연구 = A Study of Three-Dimensional Thermal Oxidation Characteristics and Simulation

다국어 초록 (Multilingual Abstract)

Three-dimensional simulator for theremal oxidation process is developed. The simulator is consisted of two individual module, one is analytic-model module and the other is numerical-model module. Thus, the prediction of LOCOS shape is possible by both numerical and analytical approach. The analytic-model used simple complementary-error function guarantees fast calculation in prediction of multi-dimensional oxidation process. The numerical-model which is based on boundary element method(BEM), has a good accuracy and suitable for various process conditions. The utility of models and simulator developed in this work is demonstrated by using it to predict not only traditional shape of LOCOS but also process effects in small geometry.