저전압 대회전을 위한 분리된 압전 구동기에 의한 미소거울 = Micromirrors Driven by Detached Piezoelectric Microactuators For Low-voltage and Wide-angle Rotation

다국어 초록 (Multilingual Abstract)

This paper presents a torsional micromirror detached from PZT actuators (TMD), whose rotational motion is achieved by push bars in the PZT actuators detached from the micromirror. The push bar mechanism is intended to reduce the bending, tensile and torsional constraints generated by the conventional bending bar mechanism, where the torsional micromirror is attached to the PZT actuators (TMA). We have designed, fabricated and tested prototypes of TMDs for single-axis and dual-axis rotation, respectively. The single-axis TMD generates the static rotational angle of 6.1˚ at 16 VDC, which is 6 times larger than that of single-axis TMA, 0.9˚. However, the rotational response curve of TMD shows hysteresis due to the static friction between the cover and the push bar in the PZT actuator. We have shown that 63.2％ of the hysteresis is due to the static friction caused by the initial contact force of the PZT actuator. Without the initial contact force, the rotational response curve of TMD shows linear voltage-angle characteristics. The dual-axis TMD generates the static rotational angles of 5.5˚ and 4.7˚ in x-axis and y-axis, respectively at 16 VDC. The measured resonant frequencies of dual-axis TMD are 2.1±0.1 ㎑ in x-axis and 1.7±0.1 ㎑ in y-axis. The dual-axis TMD shows stable operation without severe wear for 21.6 million cycles driven by 16 Vp-p sinusoidal wave signal at room temperature.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 이론적 해석 및 설계
• 3. 제작 공정
• 4. 성능시험 결과
• 5. 결론
• 감사의 글
• 참고문헌
• 저자소개

참고문헌 (Reference)

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4 H. Laor, "MEM Mirrors Application in Optical Cross-Connects" IEEE LEOS '98 21-22, 1998.

5 H. Toshiyosh, "Linearization of Electrostatically Actuated Surface Micromachined 2-D Optical Scanner" Journal of Microelectromechanical Systems 10 (10): 205-214, June2001

6 V. Aksyuk, "LambdaRouter" Proc. IEEE Optical MEMS 2001.

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8 M.-J. Kim, "Design, Fabrication and Characterization of Piezoelectric Multi-layer Cantilever Actuators for the Minimum Initial Deflection" Proc. 10th Int. Conf. Solid-State Sensors and Actuators (Transducers '99) 1758-1761, 1999.

9 Dicon Fiberoptics, "2001 Measurement Products Catalog" 2001