In this study, we propose a multi-resolution modeling method for the automated material handling system in semiconductor FABs. Discrete-event simulation is a crucial tool for experimenting and solving decision-making problems in the semiconductor indu...
In this study, we propose a multi-resolution modeling method for the automated material handling system in semiconductor FABs. Discrete-event simulation is a crucial tool for experimenting and solving decision-making problems in the semiconductor industry. However, when both the production and logistics systems of semiconductor FABs are modeled together, simulation speed can become slow. To address this issue, we suggest a method that uses high-resolution and low-resolution models simultaneously to create a model of FAB’s automated material handling system. By inheriting the logistics system characteristics extracted from the high-resolution model into the low-resolution model, we can obtain an FAB automated material handling system model with high simulation speed and accuracy. We verified the efficiency of our proposed method through simulation case studies using SMT2020 and SMAT2022 testbeds. Our proposed multi-resolution modeling method is expected to make an important technical contribution to improving the efficiency and accuracy of semiconductor FAB simulation.