두께와 직경 비에 따른 두께진동모드 압전소자의 공진 변위 궤적 = Trajectory of Resonant Displacement of Thickness Vibration Mode Piezoelectric Devices According to Diameter/Thickness Ratio

다국어 초록 (Multilingual Abstract)

In this study, thickness vibration mode piezoelectric devices for AE sensor application were simulated using ATILA FEM program, and then fabricated. Trajectory resonant displacement and electro mechanical coupling factors of the piezoelectric devices were investigated. The simulation results showed that excellent displacement and electro mechanical coupling factor was obtained when the ratio of diameter/thickness($\Phi/T$) was 0.75. The piezoelectric device of $\Phi/T$=0.75 exhibited the optimum values of fr= 183 kHz, displacement= $4.44{\times}10^{-7}[m]$, $k_{33}$= 0.69, which were suitable for the application of AE sensor piezoelectric device.

참고문헌 (Reference)

1 Z. Ruzhong, 70 : 750-, 2009

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