Theoretical and Experimental Investigation on the Probe Design of a Ridge-loaded Slot Type for Near-Field Scanning Microwave Microscope

다국어 초록 (Multilingual Abstract)

In this paper, a rectangular waveguide probe with a ridge-loaded straight slot (RLSS) is presented for a near-field scanning microwave microscope (NSMM). The RLSS is located laterally at the end wall of the cavity and is loaded on double ridges in a narrow straight slot to improve the spatial resolution compared with a straight slot. The probe consists of a rectangular cavity with an RLSS and a feed section of a WR-90 rectangular waveguide. When the proposed NSMM is located at distance of 0.1mm in front of a substrate without patches or strips, the simulated full width at half maximum (FWHM) of the probe improve by approximately 31.5 % compared with that of a straight slot without ridges. One dimensional scanning of the E-plane on a sample under test was conducted, and the reflection coefficient of the near-field scanning probe is presented.

목차 (Table of Contents)

• Abstract
• 1. Introduction
• 2. Electric Field Characteristics for an RLSS
• 3. Design of a Rectangular Waveguide Probe
• 4. Experimental results
• 5. Conclusion
• 6. Acknowledgement
• References

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