Over decades, residual gas analyzers (RGAs) have been developed extensively from analytical research to industrial fields. As semiconductor industry is growing rapidly, fast detection of residual gases becomes important for improvement of the fabricat...
Over decades, residual gas analyzers (RGAs) have been developed extensively from analytical research to industrial fields. As semiconductor industry is growing rapidly, fast detection of residual gases becomes important for improvement of the fabrication process. High performance, such as rapid scanning and fine resolution with high sensitivity, and compactness are required for industrial applications. In this work, a Time-of-Flight (ToF)mass spectrometry for fast analyzation of injected gas in real time with an electron impact ionization device has been developed and will be presented.