실리콘 박막 태양전지에서 광 포획(light trapping) 개선에 관한 연구

다국어 초록 (Multilingual Abstract)

The silicon thin film solar cells were fabricated by 13.56 MHz PECVD (Plasma-Enhanced Chemical-Vapor Deposition) and 60 MHz VHF PECVD (Very High-Frequency Plasma-Enhanced Chemical-Vapor Deposition). We focus on textured ZnO:Al films prepared by RF sputtering and post deposition wet chemical etching and studied the surface morphology and optical properties. These films were optimized the light scattering properties of the textured ZnO:Al after wet chemical etching. Finally, the textured ZnO:Al films were successfully applied as substrates for silicon thin films solar cells. The efficiency of tandem solar cells with 0.25 cm² area was 11.8% under 100mW/cm² light intensity. The electrical properties of tandem solar cells were measured with solar simulator (AM 1.5, 100 mW/cm²) and spectral response measurements.