만능 4축 병렬 스테이지의 설계

다국어 초록 (Multilingual Abstract)

The precise alignment of two glasses is a typical procedure in LCD or OLED assembly. For this process, the vision system evaluates position errors between glasses by detecting the pattern markers printed in each glass and the X, Y, R stage moves one glass to another in order to correct the error. Commonly used 2-D moving stage, called the 4-Axes Parallel Stage, has 3 motors at each corner which respectively move in X1, X2, Y or X, Y1, Y2 direction. In this stage, 3 axes motions combine to make the X, Y, R motion. Therefore the required 3 axes feed need to be calculated from the X, Y, R errors using inverse kinematics. But the inverse kinematics conversion has too many possible cases because of the diversity in stage configuration such as the motors positions and directions. In this work, the multi purpose stage is designed to transform into any configuration that can occur in practical application. When the new configuration stage is designed, inverse kinematics conversion is derived and verified in desktop environment using multi purpose parallel stage. Through this work, stage control system can be developed more efficiently.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 4축 병렬 스테이지
• 3. 만능 4축 병렬 스테이지
• 4. 결론
• 참고문헌