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Belenguer, P.;Boeuf, J. P. Subcommittee on Plasma Chemistry, International Union of Pure and Applied Chemistry 1993 p.1260-1261
Plasma and Surface Diagnostics in PECVD from Silicon Containing Organic Monomers
Favia, P.;D'Agostino, R.;Fracassi, F. Subcommittee on Plasma Chemistry, International Union of Pure and Applied Chemistry 1993 p.1262-1263
Real Time Monitoring of Surface Chemistry During Plasma Processing
Aydil, E. S. Subcommittee on Plasma Chemistry, International Union of Pure and Applied Chemistry 1993 p.1264-1265
Ion and Neutral Fluxes onto the Subtrate from a DC Discharge in Methane
Lange, K.;Jacob, W.;Moller, W. Subcommittee on Plasma Chemistry, International Union of Pure and Applied Chemistry 1993 p.1266-1271
Characterization of the RF Plasma Jet Sputtering System by Optical Emission Spectroscopy
Barankova, H.;Bardos, L.;Berg, S. Subcommittee on Plasma Chemistry, International Union of Pure and Applied Chemistry 1993 p.1272-1277
Ion Energy Distributions at the Anode of a Reactive Ion Etcher
Dickenson, A. C.;Field, D.;Klemperer, D. F.;May, P. W. Subcommittee on Plasma Chemistry, International Union of Pure and Applied Chemistry 1993 p.1278-1283
Latreche, M.;Segui, Y.;Delsol, R.;Raynaud, P. Subcommittee on Plasma Chemistry, International Union of Pure and Applied Chemistry 1993 p.1284-1289
Su, J.;Bucknall, R.;Chernesky, K.;Hills, G. W. Subcommittee on Plasma Chemistry, International Union of Pure and Applied Chemistry 1993 p.1290-1295
Muraoka, K.;Honda, C.;Uchino, K.;Kajiwara, K. Subcommittee on Plasma Chemistry, International Union of Pure and Applied Chemistry 1993 p.1296-1301
A Self-Consistent Analytical Theory of Arc Spots on Electrodes
Benilov, M. S. Subcommittee on Plasma Chemistry, International Union of Pure and Applied Chemistry 1993 p.1302-1307