Design and Fabrication of Low Temperature Processed BaTiO₃ Embedded Capacitor for Low Cost Organic System-on Package (SOP) Applications = 저가형 유기 SOP 적용을 위한 저온 공정의 BaTiO₃ 임베디드 커페시터 설계 및 제작

다국어 초록 (Multilingual Abstract)

In this paper, PCB (Printed Circuit Board) embedded BaTiO₃ MIM capacitors were designed, fabricated, and characterized for low cost organic SOP applications by using 3-D EM simulator and low temperature processes. Size of electrodes and thickness of high dielectric films are optimized for improving the performance characteristics of the proposed embedded MIM capacitors at high frequency regime. The selected thicknesses of the BaTiO₃ film are 12㎛, 16㎛, and 20㎛. The fabricated MIM capacitor with dielectric constant of 30 and thickness of 12㎛ has capacitance density of 21.5 pF/㎟ at l00㎒, maximum quality factor of 37.4 at 300 ㎒, a quality factor of 30.9 at 1㎓, self resonant frequency of 5.4 ㎓, respectively. The measured capacitances and quality factors are well matched with 3-D EM simulated ones. These embedded capacitors are promising for SOP based advanced electronic systems with various functionality, low cost, small size and volume.