LCD 제조용 Baking Chamber의 환기 성능 평가를 위한 수치 해석 = Numerical Analysis to Evaluate Ventilation Performance of Baking Chamber in LCD Manufacturing Process

다국어 초록 (Multilingual Abstract)

Due to a fume which is evaporated from a solvent in a PR(photo resist), the inside is polluted and brings problems. A consistent temperature is required for the uniform film thickness in baking process. Also, an efficient ventilation system is necessary to prevent defect and decrease of productivity because of the fume during the baking. Generally, the ventilation efficiency is evaluated by the nominal time constant which is ratio of ventilation flow rate and inside volume. On the other hand, it is ambiguous for an arbitrary point in manufacturing larger LCD baking chamber. Evaluation of the ventilation efficiency change as a function of guide angle is researched. The flow rate is set as 1000 lpm which is more than 2 times of number of ventilation. The age of air is observed when the guide angles are varied with 30°, 40°, 50°, 60° and without the guide.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 연구 방법
• 3. 결과 및 고찰
• 4. 결론
• 참고문헌