Sol-Gel 법으로 제작한 (Pb_xBa_₁-_x)TiO₃박막의 특성에 관한 연구 = The Properties of (Pb_xBa_₁-_x)TiO₃ Thin Films by Sol-Gel Method

다국어 초록 (Multilingual Abstract)

We tried to find optimal condition of (PbxBa1-x)TiO3(x=0.0, 0.2, 0.5, 0.8, 1.0) thin films produced by sol-gel spin coating. Barium acetate, Lead acetate trihydrate and Ti-isopropoxide are used as the coating sol for producing the thin film, and acetic acid, methanol, and distilled water are used as the solvent. It is found that the manufactured sol was at the most stable condition when the component content satisfied H2O/Ba=65, after observing the state transition for a specified period. We coated sol for coating on the various kinds of substrate and pre-annealed on 68℃ and 460℃. Then we annealed them on 700℃ for 30 minutes and found that they showed a good growth of crystal by the XRD measurement.
We selected Pt as the bottom electrode, using the substrate Pt/SiO2/Si in order, we raised the different conditional thin films and obtained the capacitor by evaporating Al as the top electrode. We measured the electric capacitance and dielectric loss by changing the frequency for three step as 1, 10, 100kHz for each and calculated the dielectric constant. The dielectric constant of the thin film (PbxBa1-x)TiO3 was decreased below x=0.8 and increased upto x=1.0 as x increases.

목차 (Table of Contents)

• 1.서 론
• 2.실험 방법
• 2.1 시료 제작
• 2.2 측 정
• 3.결과 및 고찰
• 4.결 론
• 후 기