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      KCI등재 SCOPUS

      Target Application Based Design Approach for RF MEMS Switches using Artificial Neural Networks

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      https://www.riss.kr/link?id=A108316396

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      다국어 초록 (Multilingual Abstract)

      In this paper, a target application-based design approach for RF MEMS switches using artifi cial neural networks (ANN) is presented. ANN approach is used to decide the dimensions of the RF MEMS switch for the targeted application. The ANN approach des...

      In this paper, a target application-based design approach for RF MEMS switches using artifi cial neural networks (ANN) is presented. ANN approach is used to decide the dimensions of the RF MEMS switch for the targeted application. The ANN approach design and analysis is done using MATLAB. The results obtained by ANN method are validated using the FEM tool simulation, which show that the developed models have good accuracy over the range of switch dimension values for the intended application. The switch dimensions are extracted for L, S, C, X, Ku, K, and Ka-band applications using ANN. Eventually, a novel RF MEMS switch based on the ANN approach for C-band applications is proposed. The required pullin voltage will increase because of perforation, and this problem is handled by adding extra weight to the membrane with pillars and slabs. Analyzed load distribution in membrane with perforation. FEM design is implemented using solid mechanics and electrostatic-based Multi-physics in COMSOL environment. Diff erent studies, i.e., stationary, time-dependent, and frequency domain are performed to extract electrical, mechanical, and Radio Frequency parameters of the proposed design. The switch designed for C-band applications off ering an actuation voltage of 7.4 V, Insertion loss of − 0.2 dB, and Isolationloss of − 57 dB.

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      참고문헌 (Reference) 논문관계도

      1 S. Younis, "a Multiphysics design optimization of RF-MEMS switch using response surface methodology" 71 : 47-60, 2018

      2 B. Nesrine, "Zerolevel packaged RF-MEMS switched capacitors on glass substrates" 29 (29): 109-116, 2020

      3 N. Hamid, "Surface roughness effects on electromechanical performance of RF-MEMS capacitive switches" 104 : 113544-, 2020

      4 D. Sukomal, "Reliable, compact, and tunable MEMS bandpass filter using arrays of series and shunt bridges for 28-GHz 5G applications" 69 (69): 75-88, 2021

      5 K. Sharma, "Reconfigurable dual notch band antenna on Si-substrate integrated with RF MEMS SP4T, Switch for GPS, 3G, 4G, bluetooth, UWB and close range radar applications" 2019

      6 O. P. Kurmendra, "Pull-in-voltage and RF analysis of MEMS based high performance capacitive shunt switch" 77 : 5-15, 2018

      7 M. Hadi, "Power efficient, low loss and ultra-high isolation RF MEMS switch dedicated for antenna switch applications" 69 : 64-72, 2017

      8 RR Benoit, "Piezoelectric RF MEMS switches on Si-on-Sapphire substrates" 29 (29): 2020

      9 L.N. Thalluri, "Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization" 2020

      10 K. Guha, "Novel, analytical model for optimizing the pull-in voltage in a Flexured MEMS switch incorporating beam perforation effect" 2017

      1 S. Younis, "a Multiphysics design optimization of RF-MEMS switch using response surface methodology" 71 : 47-60, 2018

      2 B. Nesrine, "Zerolevel packaged RF-MEMS switched capacitors on glass substrates" 29 (29): 109-116, 2020

      3 N. Hamid, "Surface roughness effects on electromechanical performance of RF-MEMS capacitive switches" 104 : 113544-, 2020

      4 D. Sukomal, "Reliable, compact, and tunable MEMS bandpass filter using arrays of series and shunt bridges for 28-GHz 5G applications" 69 (69): 75-88, 2021

      5 K. Sharma, "Reconfigurable dual notch band antenna on Si-substrate integrated with RF MEMS SP4T, Switch for GPS, 3G, 4G, bluetooth, UWB and close range radar applications" 2019

      6 O. P. Kurmendra, "Pull-in-voltage and RF analysis of MEMS based high performance capacitive shunt switch" 77 : 5-15, 2018

      7 M. Hadi, "Power efficient, low loss and ultra-high isolation RF MEMS switch dedicated for antenna switch applications" 69 : 64-72, 2017

      8 RR Benoit, "Piezoelectric RF MEMS switches on Si-on-Sapphire substrates" 29 (29): 2020

      9 L.N. Thalluri, "Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization" 2020

      10 K. Guha, "Novel, analytical model for optimizing the pull-in voltage in a Flexured MEMS switch incorporating beam perforation effect" 2017

      11 K. Guha, "Novel analytical model for optimizing the pull-in voltage in a flexured MEMS switch incorporating beam perforation effect" 2017

      12 T. Ćirić, "Neural based lumped element model of capacitive RF MEMS switches" 2018

      13 H. Campanella, "Monolithic multiband MEMS RF front-endmodule for 5G mobile" 30 (30): 2021

      14 S. Agarwal, "Modeling and analysis of capacitance in consideration of the deformation in RF MEMS shunt switch" 2016

      15 T.R. Jones, "Miniaturized folded ridged quartermode substrate integrated waveguide RF MEMS tunable bandpass filter" 2020

      16 J. Iannacci, "Internet of things (IoT); internet of everything (IoE);tactile internet; 5G—a (not so evanescent) unifying vision empowered by EH-MEMS (energy harvesting MEMS) and RF-MEMS (radio frequency MEMS)" 2018

      17 K. Srinivasa Rao, "Fabrication and characterization of capacitive RF MEMS perforated switch" 2018

      18 M. Donelli, "Exploitation of RF-MEMS switches for the design of broadband modulated scattering technique wireless sensors" 18 (18): 2019

      19 S.B. Ajay, "Electromechanical characterization of Nitinol based RF MEMS switch" 2019

      20 D. Bansal, "Effect of stress on pull-in voltage of RF MEMS SPDT switch" 67 (67): 2020

      21 M. Koutsoureli, "Dielectric charging phenomena in diamond films used in RF MEMS capacitive switches:the effect of film thickness" 64 : 660-664, 2016

      22 M. Li, "Design and fabrication of a low insertion loss capacitive RF MEMS switch with novel microstructures for actuation" 2016

      23 K. Sharma, "Design and characterization of RF MEMS capacitive shunt switch for X, Ku, K and Ka band applications" 2019

      24 T. Lakshmi Narayana, "Design and analysis of CPW based shunt capacitiveRF MEMS switch" 2017

      25 Z. Marinkovic, "Artificial neural network based design of RF MEMS capacitive shunt switches" 31 (31): 2016

      26 Z. Marinković, "Artifical neural networks in RF MEMS switch modelling" 29 (29): 177-191, 2016

      27 R. Ramana, "Analysis of RF MEMS series switch with serpentine spring shaped cantilever beam for wireless applications" 5 : 1890-1896, 2018

      28 P.A. Kumar, "An intensive approach to optimize capacitive type RF MEMS shunt switch" 2021

      29 M. Koutsoureli, "A study of material stoichiometry on charging properties of SiNx films forpotential application in RF MEMS capacitive switches" 2020

      30 M. Koutsoureli, "A study of material stoichiometry on charging properties of SiNx films for potential application in RF MEMS capacitive switches" 2020

      31 B. Deepak, "A novel capacitive RF-MEMS switch for multi-frequency operation" 133 : 106204-, 2019

      32 K. Guha, "A modified capacitance model of RF MEMS shunt switch incorporating fringing field effects of perforated beam" 114 : 35-42, 2015

      33 C. Uikyu, "A hybrid RF MEMS switch actuated by the combination of bidirectional thermal actuations and electrostatic holding" 68 (68): 3461-3470, 2020

      34 D. Birmpiliotis, "A comparative study of nanostructured Silicon-Nitride electrical properties for potential application in RF-MEMS capacitive switches" 2019

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