기준패턴과 증착패턴의 동시 측정을 통한 OLED 공정 검사 방법 = A Novel OLED Inspection Process Method with Simultaneous Measurement for Standard and Deposition Pattern

다국어 초록 (Multilingual Abstract)

The subject of the simultaneous measuring system of base pattern and deposition pattern is a new research topic on a defect inspection of OLED. In this paper, we propose a new OLED inspection method that simultaneously measures standard and deposition pattern images. This method reduces unnecessary processes and tac time during OLED inspection. For an additional reduction of the tac time during pattern measurement, the ROI was configured to measure only in the designated ROI area instead of measuring the entire area of an image. During the ROI set-up, the value of effective deposition pattern area is included so that if the deposition pattern is out of the ROI zone, it would be treated as a defect before measuring the size and center point of the pattern. As a result, the tac time and inspection process could be shortened. The proposed method also could be applied to the OLED manufacturing process. Production of OLED could be increased by reducing tac time and inspection process.

참고문헌 (Reference)

1 이경민, "패턴 비교를 통한 TFT-LCD 패널의 결함 검출 방법" 대한전기학회 57 (57): 307-313, 2008

2 유훈, "적응적인 선형 보간을 이용한 부화소 기반 영상 확대" 한국멀티미디어학회 9 (9): 1000-1009, 2006

3 김성룡, "백색광 위상 천이 간섭계에서 두 대의 카메라를 이용한 위상 오차 보정" 서울대학교 대학원 2014

4 박창민, "객체의 색상 항등성을 위한 조명 모델 응용에 관한 연구" (사)디지털산업정보학회 13 (13): 125-133, 2017

5 G. Ramponi, "Warped distance for space-variant linear image interpolation" 8 (8): 629-639, 1999

6 J. Han, "Parametric cubic convolution scaler for enlargement and reduction of image" 46 (46): 247-256, 2000

7 지승배, "OLED 재료 기술" 19 (19): 1-11, 2016

8 신동식, "OLED 디스플레이" 한국IR협의회 2019

9 S. Park, "Image reconstruction by parametric cubic convolution" 23 (23): 258-272, 1983

10 김동형, "Color Domain 및 Gamma Correction 적용에 따른 Retinex 기반 영상개선 알고리즘의 효과 분석" (사)디지털산업정보학회 15 (15): 99-107, 2019

11 J. Hwang, "Adaptive image interpolation based on local gradient features" 11 (11): 359-362, 2004

12 S. El-Khamy, "A new edge preserving pixel-by-pixel(PBC) cubic image interpolation approach" Cn.1-Cn.1, 2004