바이폴라 공정을 이용한 압력센서용 출력전압 보상회로의 설계 = A Design of Output Voltage Compensation Circuits for Bipolar Integrated Pressure Sensor

다국어 초록 (Multilingual Abstract)

In this paper, integrated pressure sensor with calibration of offset voltage and full scale output and temperature compensation of offset voltage and full scale output were designed. The signal conditioning circuitry are designed that calibrate the offset voltage and full scale output to desired values and minimize the temperature drift of offset voltage and full scale output. Designed circuits are simulated using SPICE in a bipolar technology. The ion implanted resistor of different temperature coefficient were used to trimming the desired values. As a results, offset voltage was calibrated to 0.133V and the temperature drift of offset voltage was reduced to 42 ppm/℃. Also, the full scale output was calibrated to 4.65V and the temperature coefficient of full scale output was reduced to 40ppm℃ after temperature compensation.