듀얼스테이지를 이용한 밀링머신의 가공특성 = MACHINING CHARACTERISTICS OF MILLING MACHINE USING DUAL-STAGE

다국어 초록 (Multilingual Abstract)

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the machining experiments, the single stage has an machining error of 2 micron, while the dual stage has only 0.3 micron error. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.