Effect of cathodic arc PVD parameters on roughness of TiN coating on steel substrate

다국어 초록 (Multilingual Abstract)

Titanium nitride which is widely used as a hard coating material was coated on tool steel, by physical vapor deposition method. Surface roughness was investigated as a function of deposition rate, substrate bias and temperature, nitrogen flow rate and metal ion etching. The study showed that increase in surface roughness mainly depends on the condition of sample preparation, surface treatment, macro-droplets,pitting defects, rise in compressive stress at higher coating thickness, growth defects and to a lesser extent selection of surface under testing. It was observed that chromium ion etching significantly reduced the surface roughness compared to titanium ion etching.

참고문헌 (Reference)

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