미세 플라스틱 측정을 위한 MEMS 기반 미세유체 구조와 고주파 전송특성을 이용한 전극이 결합된 센서 연구

다국어 초록 (Multilingual Abstract)

Recently, as environmental problems have grown, and among them, fine particles such as fine dust/fine plastic have become a problem, research on fine particle sensors is being actively conducted. In previous studies, the form of simply concentrating fine particles at a high concentration and putting them into a trapping space for measurement was used, and sensors with a structure of reading changes in S-parameters, especially reflection coefficient (S11), at a specific frequency using LC resonance were proposed. This form is not favorable for measuring fine particles that exist in extremely low concentrations in real-life environments. While the structure of reading reflection coefficient (S11) may be convenient for reading with commercial measurement equipment such as a Network Analyzer, it is advantageous to read transmission coefficient (S21) for commercialization. In this study, we captured lowconcentration fine particles dispersed in liquid using MEMS-based microfluidics and filter structures, thereby improving the sensitivity. Additionally, we designed the sensor to read transmission coefficient (S21) instead of reflection coefficient (S11) to increase commercial feasibility. As a result, we designed a fine particle measurement sensor with a center frequency of 1.2 GHz, and confirmed that the frequency shifted from 1.2028 GHz to 1.1929 GHz by inputting microplastics (PE).

목차 (Table of Contents)

• Abstract
• Ⅰ. 서론
• Ⅱ. 본론
• Ⅲ. 제작 및 측정 결과
• Ⅳ. 결론 및 향후 연구 방향
• 참고문헌