경 엑스선 존 플레이트(Zone Plate) 설계 및 제작

국문 초록 (Abstract)

엑스선 영상의 공간분해능은 영상획득 장치에 사용되는 광학소자의 성능에 의해 결정된다. 8.5keV에서 높은 공간분 해능 달성이 가능한 존 플레이트를 설계하였다. 방사광을 이용하는 대신 엑스선 튜브를 사용하는 영상시스템에서는 80nm의 공간분해능을 달성할 수 있음을 광선추적 기법을 이용하여 예측하였다. 전자빔 석판인쇄술을 이용하여 최외곽 폭 40nm를 갖는 존 플레이트가 제작하였다.

다국어 초록 (Multilingual Abstract)

Spatial resolution is determined by the performance of x-ray optics used in the x-ray imaging system. A zone plate was designed for obtaining a high spatial resolution image at x-ray energy of 8.5keV. A spatial resolution of 80 nm was estimated by the ray tracing when an x-ray tube of tungsten targe was used instead of synchrotron radiation. The designed zone plate of outermost zone width of 40nm was successfully fabricated by the electron-beam lithography.

참고문헌 (Reference)

1 David C, 2009

2 Young M, "Zone plates and Their Aberrations" 62 : 972-972, 1972

3 Shaver D, "X-ray Zone Plates Fabricated Using Electron-Beam and X-ray Lithography" 16 : 1626-1630, 1979

4 Attwood D, "Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications" Cambridge University Press 1999

5 Chao W, "Soft X-ray Microscopy at Spatial Resolution Better than 15 nm" 435 : 1210-1213, 2005

6 Kirz J, "Phase zone plates for X rays and the extreme UV" 64 : 301-309, 1974

7 Fischer RE, "Optical System Design" SPIE Press 2008

8 Chen YT, "Full-field hard x-ray microscopy below 30 nm: a challenging nanofabrication achievement" 19 : 302-395, 2008

9 Kumakhov MA, "Channeling of photons and new X-ray optics" 48 : 283-286, 1990