고주파 마그네트론 스퍼터링에 의한 TiO2-x 박막 습도센서의 습도감지특성 = Hygroscopic Characteristics of TiO2-x Thin Film Humidity Sensors by RF Magnetron Sputtering

다국어 초록 (Multilingual Abstract)

TiO_(2-x) thin film humidity sensors have been fabricated by sputtering method and their physical and hygroscopic characteristics have been investigated. The sputtering conditions and sintering conditions affect the sensor`s sensitivity toward humidity. AES and SEM micrographs were taken for the analysis of crystal structures, surface morphology caused by adsorbed water vapour. TiO_(2-x) humidity sensors showed negative impedance-humidity characteristics and the sensor which was fabricated by experimental condition 2(rf power of 200W) showed higher sensitivity and linearity than others. Then the slope of the sensor was about 0.794 ㏀/%RH and the response time of TiO_(2-x) humidity sensors was about 2 min. for adsorption and about 3 min. for desorption at the operating temperature of 30℃.