탐침형 정보저장 기술을 위한 실리콘 탐침의 나노 마멸 특성에 관한 연구 = Nano-wear Characteristics of Silicon Probe Tip for Probe Based Data Storage Technology

다국어 초록 (Multilingual Abstract)

The reliability issue of the probe tip/recording media interface is one of the most crucial concerns in the Atomic Force Microscope (AFM)-based recording technology. In this work, the tribological characteristics of the probe/media interface were investigated by performing wear tests using an AFM. The ranges of applied normal load and sliding velocity for the wear test were 10 to 50nN and 2 to 20㎛/s respectively. The damage of the probe tip was quantitatively as well as qualitatively characterized by Field Emission Scanning Probe Microscope (FESEM) analysis and calculated based on Archard’s wear equation. It was shown that the wear coefficient of the probe tip was in the order of 10?⁴ ~10?³, and significant contamination at the end of the probe tip was observed. Thus in order to implement the AFM-based recording technology, tribological optimization of the probe/media interface must be achieved.

목차 (Table of Contents)

• ABSTRACT
• 1. 서론
• 2. 실험시편 및 실험방법
• 3. 실험결과
• 4. 결론
• 후기
• 참고문헌