위치결정 스테이지에 대한 동적 모델링과 입력성형 제어

다국어 초록 (Multilingual Abstract)

This paper presents the dynamic analysis and input shaping control of a positioning stage. Vibration characteristics of the positioning stage are affected not only by the structural dynamics but also by the servo actuators that consist of the mechanism; driving motor and controller. This paper proposes an integrated dynamic model to accommodate both the structural dynamics and the servo actuators. Theoretical modal analysis with a commercial finite element code is carried out to investigate the dynamic characteristics of the experimental positioning stage. Experiments are performed to validate the theoretical modal analysis and estimate the equivalent stiffness due to the servo actuators. This paper deals with an input shaping scheme to suppress vibration of the positioning stage. Input shapers are systematically implemented for the positioning stage in consideration of its dynamics. The effects of servo control gain are also investigated. The experiments show that input shaping effectively removes residual vibrations and then improves the performance of positioning stage.

참고문헌 (Reference)

1 Singer N. C., "Residual Vibration Reduction in Computer Controlled Machines" MIT Artificial Intelligence Lab 1989

2 Tseng Y. T., "High-Speed and Precise Positioning of an XY Table" 11 : 357-365, 2003

3 Reeds J., "High Speed Precision XY Stage" 3 : 112-116, 1985

4 Meckl P. H., "Experimental Evaluation of Shaped Inputs to Reduce Vibration for a Cartesian Robot" 112 : 159-165, 1990

5 Park S. W., "Evaluation and Improvement of Dynamic Characteristics of 3-axis Gantry-type Stage" 2006

6 Park S. W., "Discretization Effects of Real Time Input Shaping in Residual Vibration Reduction" 16 (16): 71-78, 2007

7 Singhose W. E, "Command Generation for Dynamic Systems" Lulu.com. 2007

8 Park S. W., "A Study on Dynamic Performance of Precise XY Stages Using Real-Time Input Shaping" 2007