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이 학술지의 논문 검색
High-k Gate Dielectrics on Silicon and Germanium: Impact of Surface Preparation
Frank, M. M.; Shang, H.; Rivillon, S.; Amy, F.; Hsueh, C. L.; Paruchuri, V. K.; Mo, R. T.; Copel, M.; Gusev, E. P.; Gribelyuk, M. A. Scitec Publications Ltd 2005 p.3-6
UV Activated Surface Preparation of Silicon for High-k Dielectric Deposition
Finstad, C. C.; Muscat, A. J. Scitec Publications Ltd 2005 p.7-10
Enhanced Surface Preparation Techniques for the Si/High-k Interface
Barnett, J.; Young, C. D.; Moumen, N.; Bersuker, G.; Peterson, J. J.; Brown, G. A.; Lee, B. H.; Huff, H. R. Scitec Publications Ltd 2005 p.11-14
Uniform Ultrathin Oxide Growth for High-k Preclean
Butterbaugh, J. W.; Nelson, S. L.; Wagener, T. J. Scitec Publications Ltd 2005 p.15-18
Onsia, B.; Caymax, M.; Conard, T.; De Gendt, S.; De Smedt, F.; Delabie, A.; Gottschalk, C.; Green, M.; Heyns, M.; Lin, S. Scitec Publications Ltd 2005 p.19-22
Interface State Densities and Surface Charge on Wet-Chemically Prepared Si(100) Surfaces
Angermann, H. Scitec Publications Ltd 2005 p.23-26
A Study of the Influence of Typical Wet Chemical Treatments on the Germanium Wafer Surface
Onsia, B.; Conard, T.; De Gendt, S.; Heyns, M.; Hoflijk, I.; Mertens, P.; Meuris, M.; Raskin, G.; Sioncke, S.; Teerlinck, I. Scitec Publications Ltd 2005 p.27-30
Surface Preparation Techniques for High-k Deposition on Ge Substrates
Van Elshocht, S.; Delabie, A.; Brijs, B.; Caymax, M.; Conard, T.; Onsia, B.; Puurunen, R.; Richard, O.; Van Steenbergen, J.; Zhao, C. Scitec Publications Ltd 2005 p.31-36
Advanced Surface Cleaning Strategy for 65nm CMOS Device Performance Enhancement
Arnaud, F.; Bernard, H.; Beverina, A.; El-Farhane, R.; Duriez, B.; Barla, K.; Levy, D. Scitec Publications Ltd 2005 p.37-40
Garnier, P.; Horellou, G.; Calvier, J. J.; Labaty, D.; Levy, D. Scitec Publications Ltd 2005 p.41-44