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      마이크로 핫플레이트를 갖는 마이크로 가스센서의 열적성능에 관한 연구 = A Study on Thermal Performances of Micro Gas Sensor with Micro Hotplate

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      https://www.riss.kr/link?id=A104290488

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      다국어 초록 (Multilingual Abstract)

      - A micro hotplate for micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro hotplate was built on the gas sensor. The sensing material was deposited on the heater and electro...

      - A micro hotplate for micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro hotplate was built on the gas sensor. The sensing material was deposited on the heater and electrodes, and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power to heat up the sensing material showed a good agreement with the measured data. The design of micro gas sensor could be modified to increase the temperature uniformity and to decrease the electric power consumption by optimizing the layout of micro hotplate and electrodes.

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      참고문헌 (Reference)

      1 H. Meixner, "Thin-film gas sensors based on semiconducting metal oxides" 23 : 119-125, 1995

      2 I. Sayago, "The effect of additive in tin oxide on the sensitivity and selectivity to NOx and CO" 26-27 : 1923-1995, 1995

      3 A. G. Nassiopoulou, "Porous silicon as an effective material for thermal isolation on bulk crystalline silicon" Phys. Stat. Sol.(a) 182 : 307-312, 2000.

      4 A. Vergara, "Optimised temperature modulation of metal oxide micro-hotplate gas sensors through multilevel pseudo random sequences" 111-112 : 271-280, 2005.

      5 G. Kaltsas, "Novel C-MOS compatible silicon gas flow sensor with porous silicon thermal isolation" 76 : 133-138, 1999.

      6 I. Simon, "Micromachined metal oxide gas sensors: opportunities to improve sensor performance" 73 : 1-26, 2001.

      7 J. Cerda Belmonte, "High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications" Sensors and Actuators B

      8 K.D. Hagen, "Heat Transfer with Applications" Prentice Hall 337-371, 1999

      9 "Fundamentals of Heat and Mass Transfer" John Wiley and Sons. 2002

      10 V. Demarne, "An integrated low-power thin-film CO gas sensor on silicon" 13 : 301-303, 1988.

      1 H. Meixner, "Thin-film gas sensors based on semiconducting metal oxides" 23 : 119-125, 1995

      2 I. Sayago, "The effect of additive in tin oxide on the sensitivity and selectivity to NOx and CO" 26-27 : 1923-1995, 1995

      3 A. G. Nassiopoulou, "Porous silicon as an effective material for thermal isolation on bulk crystalline silicon" Phys. Stat. Sol.(a) 182 : 307-312, 2000.

      4 A. Vergara, "Optimised temperature modulation of metal oxide micro-hotplate gas sensors through multilevel pseudo random sequences" 111-112 : 271-280, 2005.

      5 G. Kaltsas, "Novel C-MOS compatible silicon gas flow sensor with porous silicon thermal isolation" 76 : 133-138, 1999.

      6 I. Simon, "Micromachined metal oxide gas sensors: opportunities to improve sensor performance" 73 : 1-26, 2001.

      7 J. Cerda Belmonte, "High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications" Sensors and Actuators B

      8 K.D. Hagen, "Heat Transfer with Applications" Prentice Hall 337-371, 1999

      9 "Fundamentals of Heat and Mass Transfer" John Wiley and Sons. 2002

      10 V. Demarne, "An integrated low-power thin-film CO gas sensor on silicon" 13 : 301-303, 1988.

      11 J. Wollenstein, "A novel single chip thin film metal oxide array" 93 : 350-355, 2003.

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      학술지 이력

      학술지 이력
      연월일 이력구분 이력상세 등재구분
      2007-01-01 평가 학술지 통합(등재유지)
      2006-01-01 평가 등재학술지 유지(등재유지) KCI등재
      2004-01-01 평가 등재학술지 유지(등재유지) KCI등재
      2001-07-01 평가 등재학술지 선정(등재후보2차) KCI등재
      1999-01-01 평가 등재후보학술지 선정(신규평가) KCI등재후보
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