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정해덕,박계춘,조재철,정운조,김성구 木浦大學校 工業技術硏究所 1992 工業技術硏究誌 Vol.2 No.-
The polycrystalline CuInS_2 thin films are prepared by vacuum heat treatment of layer, which is deposited by vaccum evaporation in order. The electrical and optical properties of the films are investigated at various sulfur deposition mole rate, substrate temperature, heat treatment temperature and time. From data, n type- CuInS_2 exhibits resistivity, transmittance and energy band gap with 142[Ωㆍ㎝], 73[%], and 1.5[eV] respectively at optimum fabrication condition. Finally, the films are fabricated with chalcopyrite structure.