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Characterization of Low-temperature SU-8 Negative Photoresist Processing for MEMS Applications
May Gary S.,Han, Seung-Soo,Hong, Sang-Jeen The Korean Institute of Electrical and Electronic 2005 Transactions on Electrical and Electronic Material Vol.6 No.4
In this paper, negative SU-8 photoresist processed at low temperature is characterized in terms of delamination. Based on a $3^3$ factorial designed experiment, 27 samples are fabricated, and the degree of delamination is measured for each. In addition, nine samples are fabricated for the purpose of verification. Employing the. neural network modeling technique, a process model is established, and response surfaces are generated to investigate degree of delamination associated with three process parameters: post exposure bake (PEB) temperature, PEB time, and exposure energy. From the response surfaces generated, two significant parameters associated with delamination are identified, and their effects on delamination are analyzed. Higher PEB temperature at a fixed PEB time results in a greater degree of delamination. In addition, a higher dose of exposure energy lowers the temperature at which the delamination begins and also results in a larger degree of delamination. These results identify acceptable ranges of the three process variables to avoid delamination of SU-8 film, which in turn might lead to potential defects in MEMS device fabrication.
Cheng,Soo May,Yang,Li,Dong,Lin 세계문화관광학회 2007 Conference Proceedings Vol.8 No.0
While western scholars such as Jamal and Gertz (1995), Tosun (2005), Fallon and Kriwoken (2003), usually presume that community participation is critical to sustainable tourism development, Chinese scholar Wenjun Li (2006) boldly states that it is possible for a community to achieve benefits of tourism development despite weak involvement in the planning and management of a tourist destination. Our survey of government officials, tourist business operators and residents in seven locations in the World Heritage-listed Turpan Valley in the Xinjiang province found that top-down, government-led participation is necessary and desirable, and does not detract from stakeholders' perception that they are sharing in the benefits of tourism development in the region.
자원봉사활동 참여자들의 여가동기와 행복감: 이타적 여가동기의 중요성
박세혁(Park Se-hyuk),김매이(Kim May),한수아(Han Soo-a),윤소영(Yoon So-young) 한국여가레크리에이션학회 2016 한국여가레크리에이션학회지 Vol.40 No.4
The purpose of this study was to explore the relationships among leisure motives and happiness for individuals who volunteer in leisure service programs. A strength of the current study is that we developed altruistic items in addition to Beard and Ragheb`s (1983) leisure motivation scales to explain volunteers` altruistic motives in volunteerism. It should be recognized that motivation to volunteer is usually perceived as a combination of several leisure motives, altruistic and egoistic alike. By using convenience sampling method, volunteers were drawn from 14 leisure service programs located in Seoul, Korea (n=218). The factor analysis produced a four-factor structure for the volunteerism motivation construct: social, competency, intellectual, and altruistic factors. It should be recognized that volunteers perceived the social factor, which explained 17.5% of the variance, to be most important. Regression analyses were conducted to identify the relationships among study variables. A regression analysis demonstrated the influence of leisure motives (social, competency, intellectual, and altruistic motives) on happiness in volunteerism. Our findings begin to fill the research gap, laying the groundwork for future studies of associations involving the multidimensional construct of leisure motivation and altruism in volunteerism.