Mo/SiO₂/Si(100)기판 위에 MOCVD법으로 성장시킨 AIN박막이용 GHz대역의 FBAR제작에 관한 연구

양충모,김성권,차재상,박구만,Yang, Chung-Mo,Kim, Seong-Kweon,Cha, Jae-Sang,Park, Ku-Man 한국조명전기설비학회 2006 조명·전기설비학회논문지 Vol.20 No.4

본 논문에서는 $Mo/SiO_2/Si(100)$ 기판 위에 MOCVD(Metal-Organic-Chemical-Vapor Deposition)법을 이용하여 C축 방향으로 성장시킨 AIN(Aluminum Nitride) 박막을 이용하여 GHz대역 무선 통신에서 사용할 수 있는 FBAR(Film-Bulk-Acoustic Resonator)을 제작하였다. 제작된 공진부의 공진주파수와 반공진주파수는 각각 3.189[GHz]와 3.224[GHz]으로 측정되었으며, Q값(Quality Factor)과 유효한 전기기계 결합계수(${k_{eff}}^2$)는 각각 24.7과 2.65[%]로 평가되었다. AIN의 증착(Deposition) 조건은 $950[^{\circ}C]$의 기판표면(Substrate) 온도, 20Torr의 압력, 25000의 N/Al의 V/III비로 증착하였다. $4{\times}10^{-5}[\Omega{cm}]$의 Mo 하부전극 고유저항과 $Mo/SiO_2/Si(100)$ 기판 위에 AIN(0002) FWHM(Full-Width at Half-Maximum) 4를 갖는 C축 방향성의 AIN 박막을 성공적으로 성장시켰다. 따라서 증착된 AIN박막의 FWHM값은 GHz대역 무선 통신용 RF(Radio Frequency) 밴드 패스 필터 설계에 유용하게 사용될 것이다. In this paper, it is reported that film-bulk-acoustic resonator with high c-axis oriented AIN film on $Mo/SiO_2/Si(100)$ using metal-organic-chemical-vapor deposition was fabricated. The resonant frequency and anti-resonant frequency of the fabricated resonator were observed with 3.189[GHz] and 3.224[GHz], respectively. The quality factor and the effective electromechanical coupling coefficient(${k_{eff}}^2$) were measured with 24.7 and 2.65[%], respectively. The conditions of AIN deposition were substrate temperature of $950[^{\circ}C]$, pressure of 20Torr, and V-III ratio of 25000. A high c-axis oriented AIN film with $4{\times}10^{-5}[\Omega{cm}]$ resistivity of Mo bottom electrode and $4[^{\circ}]$ of AIN(0002) full-width at half-maximum(FWHM) on $Mo/SiO_2/Si(100)$ was grown successfully. The FWHM value of deposited AIN film is useful for the RF band pass filter specification for GHz-band wireless local area network.

AlN Epitaxial Film Growth Using MOCVD For a GHz-band FBAR

Chung-Mo Yang,Seong-Kweon Kim 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.55 No.3

We present the fabrication of a film-bulk-acoustic resonator (FBAR) with a highly c-axis- oriented AlN film on Mo/SiO2/Si (100) by using metal-organic chemical-vapor deposition (MOCVD). The resonant frequency and the anti-resonant frequency of the fabricated resonator were 3.219 GHz and 3.249 GHz, respectively. The quality factor and the effective electromechanical coupling coefficient (k2 eff ) were 24.7 and 2.65%, respectively. The conditions of AlN deposition were a substrate temperature of 950℃, a pressure of 20 Torr, and a V-III ratio of 25000. We successfully grew highly c-axis-oriented AlN film with 4 × 10−5 Ωcm resistivity for the Mo bottom electrode. The full widths at half maximum (FWHM) for the AlN (0002) deposited on Mo/SiO2/Si (100) and Mo/SiO2/Si (111) were 4˚ and 3.8˚, respectively. The FWHM value of the deposited AlN film meets the RF band-pass-filter specification for a GHz-band wireless local area network. We present the fabrication of a film-bulk-acoustic resonator (FBAR) with a highly c-axis- oriented AlN film on Mo/SiO2/Si (100) by using metal-organic chemical-vapor deposition (MOCVD). The resonant frequency and the anti-resonant frequency of the fabricated resonator were 3.219 GHz and 3.249 GHz, respectively. The quality factor and the effective electromechanical coupling coefficient (k2 eff ) were 24.7 and 2.65%, respectively. The conditions of AlN deposition were a substrate temperature of 950℃, a pressure of 20 Torr, and a V-III ratio of 25000. We successfully grew highly c-axis-oriented AlN film with 4 × 10−5 Ωcm resistivity for the Mo bottom electrode. The full widths at half maximum (FWHM) for the AlN (0002) deposited on Mo/SiO2/Si (100) and Mo/SiO2/Si (111) were 4˚ and 3.8˚, respectively. The FWHM value of the deposited AlN film meets the RF band-pass-filter specification for a GHz-band wireless local area network.

문학 작품 감상 교육의 연구 방안 : 시 감상 교육의 이론과 수용자의 반응을 중심으로

이희중,강성도,정성모,이창호,조성리 전주대학교 교육문제연구소 2000 敎育論叢 Vol.15 No.-

S-Methyl-3-(2-hydroxyphenyl)methylenedithiocarbazate 와 그 유도체 텡스텐(Ⅵ)산소 착물

모성종,구본권 대구효성가톨릭대학교 1998 연구논문집 Vol.57 No.2

A gneral method for the preparation of oxotungsten(Ⅳ) complexes of the type[WOLC1₂](Where LH₂= the Schiff base derived from salicylaldehyde and its derivatives, and S-methyldithiocarbazate) usingWOC1₄as a precursor, is described. The characterizationis performed by means of the usual physicochemical techniquences. In the complex the coordination around tungsten atom is approximately octahedral with two chloride ligands in the trans position, and the remaining two equatorial sites and two axial positions occupied by ONS donor atom set of L and the terminal oxygen. Consequently the imino nitrogen of the L ligand is trans to the terminal oxygen.

차세대 고속철도 특수교량의 설계 및 기술사양 조사

박만호(Park Man-Ho),문제우(Mun Je-U),김성일(Kim Sung-Il),홍성모(Hong Seong-Mo),김종태(Kim Jong-Tae) 한국철도학회 2008 한국철도학회 학술발표대회논문집 Vol.- No.-

Mo-Am arch bridge is only the long-span bridge (with 125m span) in the Kyong-Bu high-speed line in service, while other bridges are PSC box girder bridges and steel composite bridges with span lengths of 25~50m. However, in foreign high-speed lines, special cable-supported bridges like cable-stayed bridges and extradosed bridges are being adopted in earnest with technical specifications. The cable supported bridge is recognized as one of the indices of technology in civil engineering field, and thus it is being adpoted with a sense of rivalry in countries with advanced technology in railway engineering. In this paper, to apply the top-level cable-supported bridge technology to the domestic high-speed line up to 400㎞/h by establishing the technical specifications on cable-supported bridges including span length, the requirements for securing the dynamic stability and running safety of high speed train are analyzed through case studies for domestic and foreign cases.

소아에서 나타난 비구개관낭의 치험례

모정희,정현구,조태식,김효석,박성규,이난영 조선대학교 구강생물학연구소 2002 口腔生物學硏究 Vol.26 No.2

The nasopalatine duct cyst is the most common non-odontogenic cyst in the oral area and is thought to be originated from the epithelial remnants of the nasopalatine duct. The nasopalatine duct cyst have been mentioned to be an overall incidence of 1.7-11.9% of all jaw cyst. More males than females are affected by that. It could occur all around the age, and especially in their 40th and 60th it happens the most and in childhood it is very rare. Proper treatment for nasopalatine duct cyst is enucleation. In the case of very large cysts, it is likely to be a risk of naso-oral or antral-oral fistulas or of devitalization of teeth, marsupialization is indicated. The purpose of case report is that a nasopalatine duct cyst in is very rare in childhood. A 9-year-old boy was referred to the chosun university pedodontics clinic that this child who has anterior palatal swelling is in routine check. The size of the cyst was so big that the marsupialization was committed and obturator was put. This patient is on the continuous observation. we treated the nasopalatine duct cyst with obturator.

Sprinkler System에서 조도계수에 따른 마찰손실

성은모*․어익수 호남대학교 산업기술연구소 2014 녹색산업연구 Vol.20 No.1

본 연구는 유체가 배관 내를 흐를 때 사용유체의 물리ㆍ화학적 성질에 따라 배관 재질이 선택된다. 소화설비에 사용하는 유체는 대부분 물을 사용하므로 물속에 용해된 각종 이물질 들은 관 벽에 스케일을 발생시키고 부식 및 배관 노후화를 촉진하여 마찰손실을 증가시켜 결국은 펌프의 효율을 저하시킨다. 설계 및 시공단계에서 마찰손실을 개선하기 위해 기존 강관대신 CPVC(Chlorinated Poly-Vinyl Chloride)배관을 이용하여 배관재질에 따라 마찰손 실 감소로 인한 소화시스템의 안정성 향상 및 경제성과의 상관관계를 고찰하였다. This investigation was materials for pipes are selected according to the physical and chemical properties of the fluid that flows within them. As water is most commonly used in fire fighting, a diversity of foreign materials dissolved in water cause scale on the walls of pipes used in fire fighting equipment. This causes erosion and pipe deterioration and increases friction losses, which leads to low efficiency of pumps. examined the correlations between economic success and improved safety of fire fighting systems thanks to decreased friction losses according to pipe materials when chlorinated poly-vinyl chloride (CPVC) was used to ameliorate friction losses compared to steel pipes in the design and construction stages.

地域開發學科의 敎科課程에 관한 硏究

河晟奎,朴西浩,宋仁城,金英模 檀國大學校 地域硏究所 1986 地域硏究 Vol.7 No.-

다꾸지법을 이용한 구리와 타이타늄 마찰압접부의 용접변수의 영향에 관한 연구

金成演,延倫模,鄭承富,徐昌濟 대한금속재료학회 2002 대한금속·재료학회지 Vol.40 No.7

This paper describes a fundamental investigation of the friction welding condition for the pure copper/ pure titanium joining and the effect of friction time, upset pressure on the mechanical and metallurgical properties of the joint. Taguchi method has been adopted for investigating the contribution of welding variables. Under a constant upset pressure, the tensile strength have a little difference with an increase in friction time. At a constant friction time, the tensile strength increased with an increase in the upset pressure. The tensile fracture of Cu to Ti joint occurred at the Cu base material near the interface.

요통의 병태생리

이환모,문성환,박문수 大韓痛症學會 1997 The Korean Journal of Pain Vol.10 No.-