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        Application of a High-Durability DC Arc Plasmatron to Plasma-Chemical Processing of Silicon Substrates

        Valentin Riaby,Heon-Ju Lee,Chi Kyu Choi,Ji Hoon Kim,Vadim Plaksin,Young Sun Mok 한국물리학회 2006 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.48 No.6

        A novel arc plasma source, which has a very low anode erosion rate (10.10 g/C), a nearly spectrally clean plasma flow, and a lifetime of 103 104 hours, is proposed. The plasma temperature near the nozzle exit is below 100 C at an arc power of 2 kW. The design and the characteristics of the plasmatron are discussed. Experiments with heterogeneous plasma-chemical processes proved the possibility of activating plasma flow in the technologic channel of this plasmatron at a pressure of several mbar. As an example, plasma-chemical etchings of monocrystaline silicon in a CF4 plasma and of a photo-resist on a silicon wafer in O2 and CF4 plasmas were carried out. The etching rates for both processes were evaluated to be about 1 μm/min.

      • Measurements of The Floating Electric Potentials of a Free Plasma Flow Generated by a DC Arc Plasmatron

        Lee, Heon-Joo,Riaby, V.A.,Plaksin, V.Yu. 제주대학교 공과대학 첨단기술연구소 2006 尖端技術硏究所論文集 Vol.17 No.2

        Phenomenon of discharge current diversion by conductive parts, or bodies in contact with discharge plasmas has been studied experimentally. Such a body was represented here by a set of wall mac(metal discs 4 mm in diameter) distributed along a plasma formation. The last was generated in a vacuum chamber in the form of a plasma flow from a DC arc plasmatron. Each macroprobe could be considered as a big conductive body in contact with discharge plasmas. But peculiarities of their interaction with plasma could be studied in details for bigger conductive bodies in the form of short-circuited macroprobes. In the present work plasma potential and therefore floating potential changed very little along the set of the probes. So the said unification was undertaken for the probes with the biggest difference of floating potentials. It was found out experimentally that a big conductive body in contact with discharge plasmas acquired single floating potential a little higher than the lowest floating potential for an individual probe in a big conductive body containing two short-circuited macroprobes. Besides electric current was measured in a jumper connecting two individual probes. More than that double-probe characteristic of the mentioned two individual probes was registered. All these experimental facts coincided exactly with the conclusions of previously published works where double-probe approach for the analysis of a big conductive body's behaviour in contact with discharge plasmas was applied intuitively, based on general physical notions. And the outlook of the experimental double-probe characteristic turned out to be the same as an imaginary curve plotted only on the basis of general physical notions.

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        Reduction of NOx in diesel engine emissions by using a plasmatron fuel reformer

        Heon-Ju Lee,Vadim Yu. Plaksin,Valentin A. Riaby,Young Sun Mok,Ji Hun Kim,Sang Hoon Lim 한국화학공학회 2008 Korean Journal of Chemical Engineering Vol.25 No.1

        An experimental study of diesel exhaust cleaning by means of the plasma chemical pretreatment of fuel is described. Some portion of the fuel was activated in an arc discharge and turned into hydrogen-rich synthesis gas. Plasma chemical reformation of fuel was carried out by using a DC arc plasmatron that was fabricated to increase the ability of gas activation. The yield of diesel fuel reformation reached about 80-100% when small quantities of fuel (flow rate up to ~6 ml/min) were reformed. The synthesis gas, containing H2+CO, was supplied into the engine together with the rest of the fuel-air mixture, and the NOx content in its emissions reduced up to 23%.

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