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- 저자 : Paolo Manini Enrico Maccallini 김재학(번역자) (검색결과 1 건)
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Paolo Manini,Enrico Maccallini,김재학(번역자) 한국진공학회 2018 진공 이야기 Vol.5 No.3
Non Evaporable Getter (NEG) pumps have been developed in the 70’s and since then adopted by the industry, by research centres and laboratories and by large physics projects such as accelerators, synchrotrons or fusion reactors. NEG pumps permanently remove active gases (e.g. H2, H2O, CO, CO2, N2, 02) by a chemical reaction on the getter surface. They are very compact and vibration-free pumps able to deliver large pumping speed in a very small package and with minimal power requirement. Thanks to the development of the new ZAO® getter material, the use of NEG pumps can be further extended from UHV into the high vacuum (HV) regime, also including particle sensitive applications, such as electron microscopes, photocathodes or superconductive radio frequency cavities. 2AO® based NEG pump are therefore particularly suitable to meet the new vacuum challenges of modern vacuum systems and equipment in term of miniaturization, cleanliness, ease of use and compactness. In the present paper the main features and performances of getter pumps will be reviewed and discussed with a focus on the most recent advances in term of materials, applications and design. Examples of use of NEG pumps and NEG/sputter ion pump combination in a broad range of applications will be also provided.
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