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Development of high power impulse magnetron sputtering (HiPIMS) techniques
Jyh-Wei Lee 한국표면공학회 2016 한국표면공학회 학술발표회 초록집 Vol.2016 No.11
High power impulse magnetron sputtering (HiPIMS) technique has been developed for more than 15 years. It is characterized by its ultra-high peak current and peak power density to obtain unique thin film properties, such as high hardness, good adhesion and tribological performance. However, its low deposition rate makes it hard to be applied in industries. In this work, the development of HiPIMS system and integration of radio frequency (RF) or mid-frequency(MF) power supplies were introduced. Effects of duty cycle and repetition frequency on the microstructure, mechanical property, optical and electrical properties of some binary, ternary and quarternary nitride coatings and oxide thin films were discussed. It can be observed that the deposition rate was effectively increased by the superimposed HiPIMS with RF or MF power. High hardness, good adhesion and sufficient wear resistance can be obtained through a proper adjustment of processing parameters of HiPIMS power system.
Magnetic Properties and Microscopic Structures of Ultrathin Co/p3 × p3 − R30˚-Ag/Si(111) Films
Jyh-Shen Tsay,Tsu-Yi Fu,Chih-Kuei Kao,Xiao-Lan Huang,Jyh-Ron Shue,Wei-Hsiang Chen,Yeong-Der Yao,구현주 한국물리학회 2013 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.62 No.12
Combined scanning tunneling microscopy and surface magneto-optic Kerr effect studies were employedto study the relation between magnetic properties and the microscopic interfacial structuresof ultrathin Co/p3×p3−R30˚-Ag/Si(111) films. On the top of p3×p3−R30˚-Ag/Si(111), pureCo clusters formed without disrupting the p3 × p3 − R30˚ structure of the Ag buffer layer. Thegreat strain due to the large mismatch between Co and the substrate influenced the nucleation ofCo atoms to form large clusters. No magnetic hysteresis in the polar configuration was observed forfilms thinner than 10 monolayers. The easy axis of magnetization was in the surface plane. Cappingp3 × p3 − R30˚-Ag on top of the Si(111) surface before the deposition of the Co overlayerscan efficiently reduce the nonferromagnetic Co-Si compound to zero thickness. For Co coveragebetween 2.9 and 4.2 monolayers, a lower Curie temperature was observed in ultrathin films. Due tothe existence of a smooth interface between Co and the p3 × p3 − R30˚-Ag buffer, the coercivityfor Co/p3 × p3 − R30˚-Ag/Si(111) is smaller than that for Co/Si(111).
Jyh-Ferng Yang,Cheng-Hong Yang,Hsueh-Wei Chang,Cheng-San Yang,Shao-Ming Wang,Ming-Che Hsieh,Li-Yeh Chuang 한국식품영양과학회 2010 Journal of medicinal food Vol.13 No.5
In recent years, human pathogenic microorganisms have developed multiple drug resistance and caused serious nosocomial infections. In this study, we identified four new antimicrobial compounds from the Chinese herbal medicine Illicium verum and assessed their antibacterial efficacies. The supercritical CO2 and ethanol extracts of Illicium verum showed substantial antibacterial activity against 67 clinical drug-resistant isolates, including 27 Acinetobacter baumannii, 20 Pseudomonas aeruginosa, and 20 methicillin-resistant Staphylococcus aureus. The diethyl ether (EE) fraction obtained from partition extraction and supercritical CO2 extracts revealed an antibacterial activity with a minimum inhibitory concentration value of 0.15–0.70mg/mL and 0.11mg/mL, respectively. The EE fraction of I. verum showed synergetic effects with some commercial antibiotics. The antimicrobial mechanism was investigated with killing curves and scanning electron microscopy observation. The chemical components of the extracts were analyzed by spectrophotometry; (E)-anethole, anisyl acetone, anisyl alcohol, and anisyl aldehyde exhibited antibacterial activity against different clinical isolates. These extracts from I. verum can be further developed into antibiotic medicines due to their proven antibacterial activity.
On the Design of the Latch Mechanism for Wafer Containers in a SMIF Environment
Jyh-Jone Lee,Dar-Zen Chen,Wei-Ming Pai,Tzong-Ming Wu 대한기계학회 2006 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.20 No.12
This paper presents the design of a latch mechanism for wafer containers in a standard mechanical interface environment. For an integrated circuits fabrication factory, the standard mechanical interfaced wafer container is an effective tool to prevent wafers from particle contamination during wafer storage, transporting or transferring. The latch mechanism inside the container door is used to latch and further seal the wafer container for safety and air quality. Kinematic characteristics of the mechanism are established by analyzing the required functions of the mechanisms. Based on these characteristics, a methodology for enumerating feasible latch mechanisms is developed. New mechanisms with one degree-of-freedom and up to five links are generated. An optimum design is also identified with respect to the criteria pertinent to the application. The computer-aided simulation is also built to verify the design.
On the Design of the Latch Mechanism for Wafer Containers in a SMIF Environment
Lee, Jyh-Jone,Chen, Dar-Zen,Pai, Wei-Ming,Wu, Tzong-Ming The Korean Society of Mechanical Engineers 2006 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.20 No.12
This paper presents, the design of a latch mechanism for wafer containers in a standard mechanical interface environment. For an integrated circuits fabrication factory, the standard mechanical interfaced wafer container is an effective tool to prevent wafers from particle contamination during wafer storage, transporting or transferring. The latch mechanism inside the container door is used to latch and further seal the wafer container for safety and air quality. Kinematic characteristics of the mechanism are established by analyzing the required functions of the mechanisms. Based on these characteristics, a methodology for enumerating feasible latch mechanisms is developed. New mechanisms with one degree-of-freedom and up to five links are generated. An optimum design is also identified with respect to the criteria pertinent to the application. The computer-aided simulation is also built to verify the design.
The Inventory and Statistics of Potential Large-scale Landslide Areas in Southern Taiwan
( Kuo-wei Li ),( Chien-yu Lin ),( Jyh-jong Liao ),( Yi-wen Pan ),( Keng-hao Kang ),( Che-ming Yang ) 대한지질공학회 2019 대한지질공학회 학술발표회논문집 Vol.2019 No.2
This study produced an inventory of the 2,523 potential large-scale landslide areas (PLSLAs) in southern Taiwan. These PLSLAs were delineated using LiDAR DEM of 1m resolution after the 2009 Typhoon Morakot by other institutes. Using the inventory, we conducted a statistical analysis of the important geologic and geomorphologic factors possibly related to a PLSLA. The statistical analyses reveal that, among the 2,523 PLSLAs, (1) 82% of elevation are between 750 and 2,750 m, (2) 79% of the area are between 10 and 40 hectares, (3) 76% of the slope height are between 200 and 600 m, (4) 86% of the slope are between 25 and 40 degrees and (5) 83 percent of stream order are less than 3. Rock formations of these PLSLAs range from Oligocene to Miocene; 67% of the strata are slate, and 12% are interbedded of sandstone and shale. This study selected 24 medium to high risk cases of the 2,523 PLSLAs, and interpreted the micro-geomorphological features from 1m LiDAR DEM. The following three patterns were present: (1) PLSLA with clear features of gravitational slope deformation in slope height more than 500 m condition, (2) PLSLA with the relic of paleo landslides induced by gravitational buckling, toppling, or plane sliding, (3) PLSLA with river bank erosion on slope toe and head-cut erosion induced by gully development. Based on statistics, the stream order of the PLSLAs with gravitational slope deformation usually would exceed 3; 83% of PLSLAs are the areas also with paleo large-scale landslide.