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THE GROWTH OF LiNbO3 THIN FILM BY LPMOCVD USING β-DIKETONATE COMPLEXES
Imaishi, Nobuyuki,Jung, Sang Chul 한국화학공학회 1999 Korean Journal of Chemical Engineering Vol.16 No.2
We studied the material characteristics of polycrystalline films of lithiumniobate (LiNbO₃) and its components (Li₂O and Nb₂O_5) prepared by Low Pressure Metal Organic Chemical Vapor Deposition (LPMOCVD). Precursors are Li(DPM) and Nb(DPM)₂Cl₃, and the carrier gas is nitrogen or argon with 50 % of oxygen at 5 Torr. We proposed a quantitative model for Nb₂O_5 film growth. Li₂O film grows on alumina substrate under argon+oxygen atmosphere, but Li₂CO₃ grows under nitrogen+oxygen atmosphere. On silicon or silica substrate, both react to form lithium silicates. By feeding both precursors, we found the optimum condition for preparing LiNbO₃ film from a film composition map as a function of the reaction temperature vs Li mol % in feed gas.
Development of Micro/Macro Modeling of Thin Oxide Film CVD
Jung, Sang-Chul,Imaishi, Nobuyuki 순천대학교 공업기술연구소 1998 工業技術硏究所論文集 Vol.12 No.-
ZnO, ZrO_2, Y_2O_3, Li_2O, Nb_2O_5, YSZ 그리고 LiNbO_3의 산화물 박막을 유기금속화합물을 원료료 하여 화학기상증착법으로 합성하고, 얻어진 실험 결과로부터 화학기상증착 반응기구를 micro 그리고 macro 스케일의 전산모사를 통하여 반응공학적으로 해석 하였다. 실리콘 웨이퍼에 micro 스케일로 식각된 트렌치와 홀 위에서 박막의 적층 형상을 몬테카를로 방법으로 시뮬레이션하여 표면 반응 속도상수를 결정 하였다. 한편, macro 스케일의 전산모사를 이용하여 수평관형 반응기에서의 뷸균일 적층 속도 분포를 재현함으로써 기상반응 속도상수를 구하였다. 이러한 반응기구 해석으로 장치설계의 기초 데이터 구축과 운영의 최적화를 도모하였다.
Detoxification of Aflatoxin B1 Contaminated Maize Using Human CYP3A4
( Marie Yamada ),( Koji Hatsuta ),( Mayuko Niikawa ),( Hiromasa Imaishi ) 한국미생물 · 생명공학회 2020 Journal of microbiology and biotechnology Vol.30 No.8
Aflatoxin B1 (AFB1) is a mycotoxin produced by Aspergillus flavus (A. flavus). AFB1 is reported to have high thermal stability and is not decomposed by heat treatment during food processing. Therefore, in this study, knowing that AFB1 is metabolized by cytochrome P450 (CYP), our aim was to develop a method to detoxify A. flavus-contaminated maize, under normal temperature and pressure, using Escherichia coli expressing human CYP3A4. First, the metabolic activity of AFB1 by recombinant human CYP3A4 was evaluated. As a result, we confirmed that recombinant human CYP3A4 metabolizes 98% of AFB1. Next, we found that aflatoxin Q1, a metabolite of AFB1 was no longer mutagenic. Furthermore, we revealed that about 50% of the AFB1 metabolic activity can be maintained for 3 months when E. coli expressing human CYP3A4 is freeze-dried in the presence of trehalose. Finally, we found that 80% of AFB1 in A. flavus-contaminated maize was metabolized by E. coli expressing human CYP3A4 in the presence of surfactant triton X-405 at a final concentration of 10% (v/v). From these results, we conclude that AFB1 in A. flavus-contaminated maize can be detoxified under normal temperature and pressure by using E. coli expressing human CYP3A4.
LPMOCVD에 의한 Li<sub>2</sub>O 및 Li<sub>2</sub>CO<sub>3</sub> 박막의 증착
정상철,안호근,이마이시노부유키,Jung, Sang-Chul,Ahn, Ho-Geun,Imaishi, Nobuyuki 한국공업화학회 1999 공업화학 Vol.10 No.2
Li(DPM)을 원료로 hot wall 수평 관형 반응기를 이용하여 질소-산소 및 아르곤-산소의 분위기에서 $Li_2O$ 고체박막을 LPMOCVD법으로 합성하였다. XRD와 ESCA 분석으로부터 질소-산소 분위기에서는 $Li_2CO_3$막이, 아르곤-산소의 분위기에서는 $Li_2O$막이 성장하였음을 알아냈다. 성막된 산화리튬과 리튬카보네이트는 기판의 실리콘 성분과 반응하여 실리케이트를 형성하였다. 마이크로 trench법과 Monte Carlo 시뮬레이션에 의해 기상반응 속도상수 및 표면반응 속도상수가 얻어졌으며 이를 이용한 성막속도 계산치와 실험치를 비교한 결과 실험조건범위 내에서 잘 일치하였다. Low pressure metal organic chemical vapor deposition (LPMOCVD) of $Li_2O$ solid thin films from Li(DPM) in nitrogen-oxygen or argon-oxygen atmosphere was experimentally investigated by using a small hot wall tubular type reactor. XRD and ESCA analysis revealed that $Li_2CO_3$ film grew in nitrogen-oxygen atmosphere and $Li_2O$ grew in argon-oxygen atmosphere. The grown lithium oxide or carbonate reacted with silicon or silica base materials to produce silicates. The CVD model analysis by means of the well-known micro trench method and Monte Carlo simulation was not fully successful, but a set of data on gas phase reaction rate constant and surface reaction constant was obtained.