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H₂가스 농도에 따른 SiC유도탄소막의 마모 및 마찰거동 평가
Heung-Taek Bae(배홍택),Ji-Hoon Jeong(정지훈),Dae-Soon Lim(임대순) 한국트라이볼로지학회 2008 한국트라이볼로지학회 학술대회 Vol.2008 No.11
Carbide Derived Carbon (CDC) layer is formed by reacting SiC with chlorine gas at 1000℃. Effect of H₂ gas concentration which participate to a form of carbon layer was investigated about the effect of the variation of tribological properties. H₂ gas concentration was varied with 1.7 vol%~13.3 vol% on the each carbon layer form. And carbon layer was analysed by SEM, Raman spectroscopy and Fourier transform infrared (FT-IR). Tribological properties were measured using ball-on-disk tester. Friction coefficient was varied between 0.12 and 0.17 with variation of H₂ gas concentration. This results revealed correlation between tribological properties and H₂ gas concentrations, such as, sp³ -CH₂ bonding structure which appear from the surface of the specimen represented the softness of carbon layer. And we confirmed that H₂ gas concentration affects to tribological property.