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Kim, Jinbum,Choi, Seongheum,Park, Taejin,Kim, Jinyong,Kim, Chulsung,Cha, Taeho,Lee, Hyangsook,Lee, Eunha,Won, Jung Yeon,Lee, Hyung-Ik,Hyun, Sangjin,Kim, Sunjung,Shin, Dongsuk,Kim, Yihwan,Kwon, Keewon American Chemical Society 2017 ACS APPLIED MATERIALS & INTERFACES Vol.9 No.1
<P>To synthesize a thermally robust Ni1-xPtxSi film suitable for ultrashallow junctions in advanced metal-oxide-semiconductor field-effect transistors, we used a continuous laser beam to carry out millisecond annealing (MSA) on a preformed Ni-rich silicide film at a-local surface temperature above 1000 degrees C while heating the substrate to initiate a phase transition. The melting and quenching process by this unique high-temperature MSA process formed a Ni1-xPtxSi film with homogeneous Pt distribution across the entire film thickness. After additional substantial thermal treatment up to 800 degrees C, the noble Ni1-xPtxSi film maintained a low-resistive phase without agglomeration and even exhibited interface flattening with the underlying Si substrate.</P>
김대영(Dae-Young Kim),Ngoc-Trung Nguyen,김영완(Youngwan Kim),김동현(Donghyun Kim),김동석(Dongsuk Kim),김헌영(Heon Young Kim) 한국자동차공학회 2012 한국자동차공학회 학술대회 및 전시회 Vol.2012 No.11
Interior parts of automotive are made of polymers like rubber, foam, plastics and composite materials and are directly related to the impact behavior of passenger at crash event. Especially, plastics is widely used in the interior parts due to the low price, reduction of weight and formability. However, material modeling of plastics is difficult because of the material characteristics such as softening, dilatation and pressure dependency. Usually, the material modeling of plastics considers the methods applying in the metal materials, but it is not suitable in the large deformation problem like crash analysis. So, the material models which express the mechanical characteristics of plastics exactly are needed. The LS-DYNA commercial software recommends several models for plastics. In this paper, several models which are suitable for plastics are compared. Experiments process and specimens are introduced to obtain the material parameters. To simulate the coupon test, F. E. modeling was constructed and compared with experiment data.