AlN Epitaxial Film Growth Using MOCVD For a GHz-band FBAR

Chung-Mo Yang,Seong-Kweon Kim 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.55 No.3

We present the fabrication of a film-bulk-acoustic resonator (FBAR) with a highly c-axis- oriented AlN film on Mo/SiO2/Si (100) by using metal-organic chemical-vapor deposition (MOCVD). The resonant frequency and the anti-resonant frequency of the fabricated resonator were 3.219 GHz and 3.249 GHz, respectively. The quality factor and the effective electromechanical coupling coefficient (k2 eff ) were 24.7 and 2.65%, respectively. The conditions of AlN deposition were a substrate temperature of 950℃, a pressure of 20 Torr, and a V-III ratio of 25000. We successfully grew highly c-axis-oriented AlN film with 4 × 10−5 Ωcm resistivity for the Mo bottom electrode. The full widths at half maximum (FWHM) for the AlN (0002) deposited on Mo/SiO2/Si (100) and Mo/SiO2/Si (111) were 4˚ and 3.8˚, respectively. The FWHM value of the deposited AlN film meets the RF band-pass-filter specification for a GHz-band wireless local area network. We present the fabrication of a film-bulk-acoustic resonator (FBAR) with a highly c-axis- oriented AlN film on Mo/SiO2/Si (100) by using metal-organic chemical-vapor deposition (MOCVD). The resonant frequency and the anti-resonant frequency of the fabricated resonator were 3.219 GHz and 3.249 GHz, respectively. The quality factor and the effective electromechanical coupling coefficient (k2 eff ) were 24.7 and 2.65%, respectively. The conditions of AlN deposition were a substrate temperature of 950℃, a pressure of 20 Torr, and a V-III ratio of 25000. We successfully grew highly c-axis-oriented AlN film with 4 × 10−5 Ωcm resistivity for the Mo bottom electrode. The full widths at half maximum (FWHM) for the AlN (0002) deposited on Mo/SiO2/Si (100) and Mo/SiO2/Si (111) were 4˚ and 3.8˚, respectively. The FWHM value of the deposited AlN film meets the RF band-pass-filter specification for a GHz-band wireless local area network.

Mo/SiO₂/Si(100)기판 위에 MOCVD법으로 성장시킨 AIN박막이용 GHz대역의 FBAR제작에 관한 연구

양충모,김성권,차재상,박구만,Yang, Chung-Mo,Kim, Seong-Kweon,Cha, Jae-Sang,Park, Ku-Man 한국조명전기설비학회 2006 조명·전기설비학회논문지 Vol.20 No.4

본 논문에서는 $Mo/SiO_2/Si(100)$ 기판 위에 MOCVD(Metal-Organic-Chemical-Vapor Deposition)법을 이용하여 C축 방향으로 성장시킨 AIN(Aluminum Nitride) 박막을 이용하여 GHz대역 무선 통신에서 사용할 수 있는 FBAR(Film-Bulk-Acoustic Resonator)을 제작하였다. 제작된 공진부의 공진주파수와 반공진주파수는 각각 3.189[GHz]와 3.224[GHz]으로 측정되었으며, Q값(Quality Factor)과 유효한 전기기계 결합계수(${k_{eff}}^2$)는 각각 24.7과 2.65[%]로 평가되었다. AIN의 증착(Deposition) 조건은 $950[^{\circ}C]$의 기판표면(Substrate) 온도, 20Torr의 압력, 25000의 N/Al의 V/III비로 증착하였다. $4{\times}10^{-5}[\Omega{cm}]$의 Mo 하부전극 고유저항과 $Mo/SiO_2/Si(100)$ 기판 위에 AIN(0002) FWHM(Full-Width at Half-Maximum) 4를 갖는 C축 방향성의 AIN 박막을 성공적으로 성장시켰다. 따라서 증착된 AIN박막의 FWHM값은 GHz대역 무선 통신용 RF(Radio Frequency) 밴드 패스 필터 설계에 유용하게 사용될 것이다. In this paper, it is reported that film-bulk-acoustic resonator with high c-axis oriented AIN film on $Mo/SiO_2/Si(100)$ using metal-organic-chemical-vapor deposition was fabricated. The resonant frequency and anti-resonant frequency of the fabricated resonator were observed with 3.189[GHz] and 3.224[GHz], respectively. The quality factor and the effective electromechanical coupling coefficient(${k_{eff}}^2$) were measured with 24.7 and 2.65[%], respectively. The conditions of AIN deposition were substrate temperature of $950[^{\circ}C]$, pressure of 20Torr, and V-III ratio of 25000. A high c-axis oriented AIN film with $4{\times}10^{-5}[\Omega{cm}]$ resistivity of Mo bottom electrode and $4[^{\circ}]$ of AIN(0002) full-width at half-maximum(FWHM) on $Mo/SiO_2/Si(100)$ was grown successfully. The FWHM value of deposited AIN film is useful for the RF band pass filter specification for GHz-band wireless local area network.

KOREAN NAVTEX PLAN

Chung,Se-Mo 한국항해항만학회 1997 한국항해항만학회 학술대회논문집 Vol.1997 No.5

The NDGPS Plan of Korea

CHUNG,Se-Mo 한국항해항만학회 2001 한국항해항만학회 학술대회논문집 Vol.3 No.-

Korean government decided to provide the NDGPS service and the conceptional design report are presented here. The coverage of the exiting MDGPS stations of inland area is measured and the positions and characteristics of additional inland NDGPS sites are proposed for the full-coverage of inland areas of Korea.

도덕적 언어와 인간성 회복의 미학 : 하인리히 뵐을 중심으로

정인모 국제기독교언어문화연구원 2000 기독교언어문화논집 Vol.4 No.-

Dr. In Mo Chung. 2000. The Moral Language and Aesthetics for Restoration of Human Nature. Collected Papers on Christian Language Culture. On the basis of Heinrich Böll's Christian worldview and religious trend of his literary works, this paper aims at his linguistic criticism and Christian image of humanity. Following the introduction in Chapter 1, this paper argues Heinrich Böll and Christianity in Chapter 2, linguistic criticism and restoration of morality in Chapter 3, Christian humanism in Chapter 4, and the conclusion in Chapter 5. Especially, in Böll's Linguistic criticism there can be found restoring the people's confidence based on restoration of language morality as well as Christian love, and human revival of conscience. Accordingly, this paper suggests that, as a means to tiding over dehumanization in our century, we moderns must try to find true humanity in Christian spirit.(Prof. German language education, Pusan University)

태권도 지도 효능감의 개념 구조

정청희,임태희,윤익모 한국스포츠심리학회 2003 한국스포츠심리학회지 Vol.14 No.3

본 연구의 목적은 태권도 지도 효능감의 개념 구조를 확인하고 서구에서 개발된 스포츠 코칭 효능감(Feltz 등, 1999)과 한국형 코칭 효능감(박정근, 1996)의 차이를 규명하는데 있다. 전국 소재 태권도 도장 지도자 90명을 대상으로 한 개방형 설문지 반응을 귀납적 내용분석 하였으며, 여기에서 얻어진 130개 문항을 2차 수정과정을 거쳐, 탐색적 요인분석과 확인적 요인분석을 실시하여 구조 타당성을 검증하였다. 요인탐색에서 5개 요인에 21개 문항이 탐색되었고, 최종적으로 확인적 요인분석에서 기술지도, 동기유발, 지도자 수양, 지도자 상담으로 네 개 요인에 총 19개 문항을 확정했으며, 확인적 요인분석의 적합도 지수 값들이 대체적으로 적합한 것으로 나타났다. 결과적으로, 본 연구를 통해 한국 태권도 지도 효능감의 개념은 기술지도, 동기유발, 지도자 수양, 지도자 상담 요인 등 네 개의 일반영역으로 구성되며, 스포츠 코칭 효능감의 개념구조와는 다른 것으로 나타났다. The purpose of this research was to extract dimensions of the TaeKwonDo Coaching-Efficacy and to confirm the conceptual construction, which is based on TaeKwonDo Coaching-Efficacy. An open-questionnaire made through a pilot study was administered to 90 TaeKwonDo coaches, who were distributed in the whole country, to collect sources of TaeKwonDo Coaching-Efficacy, which were conducted by inductive analysis. There were collected 1,225 cases of the foundational basic data on the efficacy. However, 125 cases were selected by excepting overlapping data and collecting similar ones among those things in specialist groups. 125 cases of the sources were categorized in 23 detail domains. In the field of the detail territories, the Questionnaire of TaeKwonDo Coaching-Efficacy(QTKDCE) was created by two adjustments. According to adjustment, there were selected 74 questions through specialists' meeting. These researches were performed by two kinds of methods. The exploratory factor analyses were done in the first research. In the second one, the confirmatory factor analyses were used. The results were produced in two researches as follows. The first, TaeKwonDo Coaching-efficacy were confirmed as teaching techniques(5 scales), arousing motivation(5 scales), master's cultivation(5 scales), master's consultation(4 scales) with four factors and nineteen scales totally. The second, the result of confirmatory factor analyses, most index values were appeared probably appropriate fit. According to this study the conception of TaeKwonDo Coaching-Efficacy was confirmed that it was different with Feltz(1999)'s and Park(1996)'s conceptual construction.

골프 드라이브 셋업의 지면반력 일관성과 전략

양충모,서국웅 釜山大學校 附設 體育科學硏究所 2009 體育科學硏究所 論文集 Vol.25 No.1

골프나 양궁 등의 스포츠에서 일관적인 운동이나 자세수행은 경기력 향상에 매우 중요한 능력이다. 골프 게임에서 여러 가지 요소에서 일관성은 성공적인 골프를 위한 것으로 골프 지도자들에 의해 강조되고 있고, 셋업은 골프스윙에 가장 큰 영향을 미친다. 본 연구의 목적은 여자 프로골퍼가 드라이브 셋업을 할 때 지면반력(GRF)평균과 체중의 양발배분의 크기를 밝히는데 있다. 연구에 13명의 KLPGA정회원이 참가하였다. 연구의 변수는 좌.우 발의 GRF(LFz, RFz)와 압력중심점의 거리(DCoP)로 하였다. 각 피험자에게서 15회 셋업의 변이계수(CV)를 계산하였다. Fz와 DCoP의 CV는 1.8+-0.5% 였다. 3가지의 다른 체중 분배와 무게 중심전략으로 나타났다. 이 결과로 여자프로골퍼들의 셋업은 매우 일관된 각자의 전략을 갖고 있음을 알 수 있다.

골프 드라이브 스윙 시 엎침과 뒤침에 대한 근전도 비교

양충모 釜山大學校 附設 體育科學硏究所 2004 體育科學硏究所 論文集 Vol.20 No.-

This study analyzed Average %MVC using the muscles of five high school golf players(career over 4 years), and five university students(career under 10 months)....

同軸形 色素레이저의 製作 및 出力 特性

朴成培,鄭謨基 대구대학교 기초과학연구소 1987 基礎科學硏究 Vol.4 No.-

A coaxial flashlamp-pumped dye laser is developed and its output characteristics is investigated. The laser is pumped by an argon flashlamp which is placed along the same axes with dye cell. Rhodamine 6G dye in ethanol is used as Iasant and the dye solution is circulated by gravity. The Iaser pulse duration is measured to be 0.5 μsec (FWHM) when the duration of pumping Iight pulse is 7 μsec (FWHM) with dye concentration of 5 × 10^(-4)mo1/L. The peak output power of laser is saturated when the pressure of argon flashlamp is 450 torr.

진동시험에 의한 참외의 진동특성

김만수,정현모,김기석,박정길 충남대학교 농업과학연구소 2005 농업과학연구 Vol.32 No.1

During a long journey of agricultural products from the production area to markets, the quality of agricultural products was always affected by some degree of vibration. The vibration input during the transportation may cause serious agricultural product injury, and this damage is particularly severe whenever the vegetable inside package is free to bounce, and is vibrated at its resonant frequency. The objectives of this study were to determine the resonant frequency of the oriental melon and to investigate the relationships between resonant frequency and physical properties of the oriental melon such as mass, volume and major and minor axes. In this study vibration testing device was constructed to determine the vibration response of the oriental melon in frequency ranges of 5 to 150 Hz. The computer program for controlling the vibration shaker and the function generator and measuring the vibration characteristics of the oriental melon was developed. The ranges of resonant frequency and peak acceleration at resonance of the oriental melon were 51 to 73 Hz and 1.24 to 1.92 G-rms, respectively. The resonant frequency and the peak acceleration decreased with the increase of the sample mass, volume, major and minor axes of the oriental melon. Multiple regression models for resonant frequency and peak acceleration of the oriental melon as a function of mass, major axis and minor axis of the sample were developed and analyzed.