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Byoung-Gue MIN,Chul-Won JU,Jong-Min LEE,Kyung-Ho LEE,Seong-Il KIM 한국물리학회 2004 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.45 No.3
A significant degradation of current gain of InP/InGaAs/InP double heterojunction bipolar transistors was observed after passivation. The amount of degradation depended on the degree of surface exposure of the p-type InGaAs base layer according to the epi-structure and device structure. The deposition conditions such as deposition temperature, kinds of materials (silicon oxide, silicon nitride and aluminum oxide) and lm thickness were not major variables to aect the device performance. The gain reduction was prevented by the BOE treatment before the passivation. A possible explanation of this behavior is that unstable non-stoichiometric surface states produced by excess In, Ga, or As after mesa etching are eliminated by BOE treatment and reduce the surface recombination sites.
Analysis of issues in gate recess etching in the InAlAs/InGaAs HEMT manufacturing process
Byoung-Gue Min,Jong-Min Lee,Hyung Sup Yoon,Woo-Jin Chang,Jong-Yul Park,Dong Min Kang,Sung-Jae Chang,Hyun-Wook Jung Electronics and Telecommunications Research Instit 2023 ETRI Journal Vol.45 No.1
We have developed an InAlAs/InGaAs metamorphic high electron mobility transistor device fabrication process where the gate length can be tuned within the range of 0.13㎛-0.16㎛ to suit the intended application. The core processes are a two-step electron-beam lithography process using a three-layer resist and gate recess etching process using citric acid. An electron-beam lithography process was developed to fabricate a T-shaped gate electrode with a fine gate foot and a relatively large gate head. This was realized through the use of three-layered resist and two-step electron beam exposure and development. Citric acid-based gate recess etching is a wet etching, so it is very important to secure etching uniformity and process reproducibility. The device layout was designed by considering the electrochemical reaction involved in recess etching, and a reproducible gate recess etching process was developed by finding optimized etching conditions. Using the developed gate electrode process technology, we were able to successfully manufacture various monolithic microwave integrated circuits, including low noise amplifiers that can be used in the 28 GHz to 94 GHz frequency range.
Byoung Gue Jung,Jihee Jo,Jin Won Yu,임종국 대한화학회 2014 Bulletin of the Korean Chemical Society Vol.35 No.12
Monitoring of pH, especially under highly alkaline conditions, is necessary in various processes in the industrial, biotechnological, agricultural, and environmental fields. However, few pH indicators that can function at highly alkaline levels are available, and most of which are organic-based pH indicators. Several years ago, it was reported that gold nanoparticles prepared using trisodium citrate dihydrate were rapidly aggregated at pH values higher than ~12.7. A shift of surface plasmon resonance for such aggregated gold nanoparticles can be applied to pH indicators, allowing for the substitution of traditional organic-based pH indicators. The most important characteristic of pH indicators is the transition pH range. Herein, gold and silver nanoparticles are prepared using different reducing agents, and their transition pH ranges are examined. The results showed that all nanoparticles prepared in this study exhibit similar transition pH ranges spanning 11.9– 13.0, regardless of the nanoparticle material, reducing agents, and concentration.
Min Byoung-Gue,Chang Sung-Jae,Jung Hyun-Wook,Yoon Hyung Sup,Lee Jong-Min,Jang Woo-Jin,Kang Dong-Min 한국물리학회 2020 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.77 No.2
In the fabrication of InAlAs/InGaAs metamorphic high-electron-mobility transistor (mHEMT), the determination of whether etching has been completed to the desired gate recess depth is made by measuring whether the drain current through the channel layer has reached the target current. Non-uniformity of the etching rate occurs during wet etching with citric acid. In this study, the cause of that non-uniformity was investigated. We confirmed that an electrochemical potential caused by the electrolyte of the etching solution was induced between the ohmic electrode and the epitaxial layer of the recess region, resulting in a non-uniform etching rate. In particular, the case where the Au of an ohmic electrode is exposed by the monitor window for the measuring channel current was considered. The gate recess etch rate was changed by the presence, location and size of the photoresist openings on the ohmic electrodes.
AlGaN/GaN HEMT 소자 제작에서 게이트 리세스 공정 개선에 의한 소자 DC 특성의 변화
민병규(Byoung-Gue Min),윤형섭(Hyung Sup Yoon),안호균(Ho-Kyun Ahn),김해천(Haecheon Kim),조규준(Kyu-Jun Cho),이종민(Jong-Min Lee),김성일(Seong-Il Kim),강동민(Dong-Min Kang),이상흥(Sang-Heung Lee),주철원(Chul-Won Ju),김동영(Dong-Young K 대한전자공학회 2015 대한전자공학회 학술대회 Vol.2015 No.6
In the fabrication of AlGaN/GaN HEMT on SiC, it is critical to establish a stable process condition of a gate recess. In this study, we etched the AlGaN layer by a low-energy ICP with variations of etch times. In addition, HC1 treatment followed the etch step. The 2-times process of SiN deposition and etch was tried to reduce the gate length by mis-aligned lithography. A proportional relationship between Vth(or Gm) and recess etch depth was identified. There also was a surface-improving effect to reduce the leakage current by HC1 treatment.
대학주최 태권도대회의 이벤트속성과 대학신뢰, 대학이미지, 재참가의도와의 관계
차병규(Byoung Gue Cha),조송현(Song Hyun Cho),김종백(Jong Back Kim) 한국사회체육학회 2012 한국사회체육학회지 Vol.0 No.48
The purpose of this study was to investigate the effect of the attributes of Taekwondo competition hosted by university on university-trust, university-image, and re-participation intention. A questionnaire method was used for collecting data, and 421 questionnaires were collected from participants(176 athletes and 223 spectators) in the Taekwondo competition hosted by D university in Busan. Among them, 22 questionnaires were excluded because they were inappropriate. 399 questionnaires were finally used for data analysis processing. Data were analyzed with frequency analysis, reliability analysis, exploratory factor analysis, and multiple regression analysis using SPSS 17.0. The results were as followings; first, among attributes of Taekwondo competition hosted by university, factors of game management, cost, environment, and service, except for competition facility, had a positive influence on university-trust and university-image. second, university-trust had a positive influence on university-image. third, university-trust and university-image had a positive influence on re-participation intention.
Jung, Byoung Gue,Jo, Jihee,Yu, Jin Won,Lim, Jong Kuk Korean Chemical Society 2014 Bulletin of the Korean Chemical Society Vol.35 No.12
Monitoring of pH, especially under highly alkaline conditions, is necessary in various processes in the industrial, biotechnological, agricultural, and environmental fields. However, few pH indicators that can function at highly alkaline levels are available, and most of which are organic-based pH indicators. Several years ago, it was reported that gold nanoparticles prepared using trisodium citrate dihydrate were rapidly aggregated at pH values higher than ~12.7. A shift of surface plasmon resonance for such aggregated gold nanoparticles can be applied to pH indicators, allowing for the substitution of traditional organic-based pH indicators. The most important characteristic of pH indicators is the transition pH range. Herein, gold and silver nanoparticles are prepared using different reducing agents, and their transition pH ranges are examined. The results showed that all nanoparticles prepared in this study exhibit similar transition pH ranges spanning 11.9-13.0, regardless of the nanoparticle material, reducing agents, and concentration.