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RISS 인기검색어
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- 저자 : Nico P. van Dijk Fred van Keulen) (검색결과 1 건)
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Topology Optimization of MEMS Structures Considering Etching Uncertainty
Gang-Won Jang(장강원),Nico P. van Dijk,Fred van Keulen 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.5
Topology optimization for reliable micro mechanical structures with respect to geometric uncertainties during etching process is presented by using the level-set method. The etching uncertainty is treated as the bounded-but-unknown parameter and the performance drops by the worst etched micro structures are limited as the constraint form of optimization. To this end, models of the over-or under-etched structures should be consistently built from the nominal models during the whole optimization process, which is very hard by using conventional SIMP-based topology optimization methods. By using the level-set method, due to the implicit boundary representation and the signed distance property of the level-set function, models according to the uncertain etching parameter can be easily constructed. The effectiveness of the proposed approach is verified through design examples for mean compliance minimization problems and compliant mechanism problems.
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