구리의 선택적 전착에서 결정 입자의 크기가 전기적 접촉성에 미치는 영향

황규호,이경일,주승기,강탁,Hwang, Kyu-Ho,Lee, Kyung-Il,Joo, Seung-Ki,Kang, Tak 한국결정성장학회 1991 韓國結晶成長學會誌 Vol.1 No.2

초 고집적 회로의 시대로 접어들면서 지금까지의 금속선 형성 기술 및 배선 재료에 많은 문제점들이 나타나고 있다. 알루미늄의 대체 재료로서 검토되고 있는 구리를, 전기 화학적 방법에 의해 미세 접촉창에 선택적으로 충전함으로써 새로운 금속선 형성 기술을 제시하고자 하였다. 0.75M의 황산구리 수용액을 전해액으로 사용하여 p형 (100) 규소 박판위에 구리 전착막을 형성한 후 Alpha Step, 주사 전자 현미경, 4-탐침법을 사용하여 막의 두께, 입자 크기, 비저항을 측정함으로써 전착 시간, 전류 밀도, 첨가물로 사용한 젤라틴 농도가 전착막의 성질에 미치는 영향에 대해 조사하였다. 평균 전착 속도는 전류 밀도가 $ 2A/dm^2$일 때 0.5-0.6\mu\textrm{m}$/min 였고 구리 입자의 크기는 전류밀도 증가에 따라 증가하였다. 입자 크기 $4000{\AA}$이상에서 얻어진 비저항값은 3-6 Ω.cm였다. 젤라틴을 첨가하여 입자의 크기를 $0.1\mu\textrm{m}$이하로 감소시킴으로써 크기 $1\mu\textrm{m}$이하의 접촉장에 구리를 선택적으로 충전시키는데 성공하였다. With the advent of ULSI, many problems in previous metallization techniques and interconnection materials have become more serious. In this work, selective deposition of copper to fill the submicron contact has been tried. After forming electro-deposited copper films on p-type (100) silicon wafer using 0.75M $CuSO_4{\cdot}$5H_2O$ as an electrolyte, the effect of deposition time, current density and concentration of an additive on film properties were investigated. Film thickness, particle size and resistivity were analyzed by Alpha Step, SEM and 4 - point probe measurement respectively. The deposition rate was about $0.5-0.6\mu\textrm{m}$/min at $2A/dm^2$ and the particle size increased with increasing current density. The resistivities of electro-deposited copper films were about $3-6{\mu}{\Omega}{\cdot}$cm for the particle size above $4000{\AA}$. By the addition of 0.2 g/l gelatin, the particle size was reduced to less than $0.1{\mu}m $ and selective plugging of copper on submicron contacts could be successfully achieved.

나노 프로브의 설계 및 제조 공정

박영근(Young Geun Park),황규호(Kyu Ho Hwang),성우경(Woo Kyung Sung) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.11

Nano probe with Si tip, PR sensor for displacement sensing which is actuated by piezoelectric mateteial(PZT) was designed. Unit process for fabricating the nano probe were developed. By integrating unit process, the nano probe was fabricated. The displacement of nano probe with applied voltage was measured. And array nano probe was fabricated by expanding unit nano probe.

VLAN을 이용한 네트워크 분할 환경에서의 네트워크 접근 제어 우회 공격 탐지 및 방어 기법

김광준(Kwang-jun Kim),황규호(Kyu-ho Hwang),김인경(In-kyoung Kim),오형근(Hyung-geun Oh),이만희(Man-hee Lee) 한국정보보호학회 2018 정보보호학회논문지 Vol.28 No.2

불필요한 트래픽의 송수신을 통한 분리된 조직/부서 간의 내부 자료 유출을 방지하기 위해 많은 조직에서 네트워크를 분할하여 망을 관리한다. 물리적으로 별도의 장비를 기반으로 하는 것이 가장 근본적인 네트워크 분할 방식이나 이보다 적은 비용으로 구축이 가능한 가상랜(Virtual LAN, VLAN) 네트워크 접근 제어 기능을 활용하여 논리적으로 네트워크를 분할 · 운영하는 사례가 존재한다. 본 연구에서는 VLAN ID값을 검색하는 스캐닝 기법과 Double Encapsulation VLAN Hopping 공격기법을 활용해 VLAN을 이용하여 분할된 네트워크 간 통신 우회 가능성을 제시한 후, 스캐닝을 통해 획득한 VLAN ID 정보를 이용한 자료 유출 시나리오를 제시한다. 또한 이 공격을 탐지 및 차단하기 위한 기법을 제안하고 구현을 통해 제시된 기법의 효과에 대해 검증한다. 본 연구는 궁극적으로 VLAN으로 분리된 네트워크 취약점을 활용한 자료 유출 또는 외부 사이버 공격을 차단함으로써 VLAN 이용 환경의 보안성 향상에 기여할 것으로 기대한다. Many organizations divide the network to manage the network in order to prevent the leakage of internal data between separate organizations / departments by sending and receiving unnecessary traffic. The most fundamental network separation method is based on physically separate equipment. However, there is a case where a network is divided and operated logically by utilizing a virtual LAN (VLAN) network access control function that can be constructed at a lower cost. In this study, we first examined the possibility of bypassing the logical network separation through VLAN ID scanning and double encapsulation VLAN hopping attack. Then, we showed and implemented a data leak scenario by utilizing the acquired VLAN ID. Furthermore, we proposed a simple and effective technique to detect and prevent the double encapsulation VLAN hopping attack, which is also implemented for validation. We hope that this study improves security of organizations that use the VLAN-based logical network separation by preventing internal data leakage or external cyber attack exploiting double encapsulation VLAN vulnerability.

周邊熱플럭스가 非均一한 任意形態斷面을 가진 垂直덕트에서의 層流組合 對流熱傳達

최인규,황규호 연세대학교 산업기술연구소 1982 논문집 Vol.14 No.1

任意의 幾何學的 形態의 斷面을 가진 垂直덕트內 層流組合 對流熱傳達에서 境界條件으로 壁溫一定의 경우에는 Nayak 등의 有限要素法解가 있다. 境界條件의 周邊熱플럭스가 非均一 (均一包含)한 경우에 對해서는 最近에 Park 등이 그 解法을 提示하였다. 그러나 이 解法을 利用하는데 있어서는 壓力勾配파라미이터 L를 Input data로 넣어야만 하는 問題가 있고, 이것이 未知인 경우에는 이 解法適用이 어렵다. 本論文에서는 L를 包含한 새로운 無次元溫度를 導入하여 L 가 未知인 경우에도 解를 求할 수 있도록 誡圖한 것이며 例題에서 보는 바와 같이 本解法에 依한 計算値는 旣存解와 같이 잘 一致한다. Combined free and forced convection in laminar flow with constant axial heat flux is analyzed for vertical, arbitrarily shaped ducts by FEM. The circumferential boundary condition of arbitrary heat flux is considered. The method presented here defines two new variables in terms of velocity and temperarure that effecively eliminate the pressure gradient parameter from the governing equations. Three geometric shapes-circle, rectangle, and triangle-are chosen for the cross-section of the ducts to be evaluated by the technique presented here. And the results closely approximate the available analytical solutions. Finally, the method described here proves to be effective in obtaining the veloity, the difference between the wall temperature and the fluid mean temperature,and the Nusselt numbers without knowing the value of pressure gradient parameter.

超軟弱 粘土의 壓密特性 硏究

李揆丸,李松,黃圭鎬,金周豪 서울市立大學校 1994 論文集 Vol.28 No.-

In recent years, the projects dealing with the marine clay have raising tendency. For example, the dredged clay can be used directly as the reclamation fill material. In this case, it is important to understand the consolidation characteristics for settlement analysis. Using conventional testing procedure, the determination of the consolidation characteris tics of cohesive soils requires consolidation time. the constant rate of strain consolidation test has been proposed as a method to reduce consolidation test time. The information used to the characteristics of settlement has been obtained using a standard oedometer test, but standard oedometer test may not be applicable to very soft soils with high water content because of limations both in theory and in testing techniques. A new constant rate of strain consolidation testing technique for very soft soils with water content of 200 to 500 % is proposed as an alternative of conventioinal oedometer test. This paper presents several benifts on the constant rate of strain consolidation test. To find the consolidation characteristics of the dredged soft clay constant-rate-of-strain consolidation testing method is used In this paper constant rate of strain consolidation test are compared with standard oedometer test for applicablity of constant rate of strain consolidation test It is concluded that the consolidation constants of very soft clays can be accurately determined from the constant rate of strain tests,also is suitable test of derdged clays as this test is applicable to regimes of the low stress level and high stress level

眞空荷重에 의한 粘土의 排水保進에 關한 實驗的 硏究

조준상,황규호,이규환,이송 서울시립대학교 산업기술연구소 1995 산업기술연구소논문집 Vol.3 No.-

반응성 스퍼터링법에 의해 형성된 니켈 산화물 박막에서 리튬의 전기화학적 거동에 관한 연구

주승기,이세희,황규호 대한금속재료학회(대한금속학회) 1994 대한금속·재료학회지 Vol.32 No.10

Electrochemical insertion and removal of lithium into nickel oxide films prepared by reactive sputtering have been investigated. The chemical diffusion kinetics of lithium in NiO thin films have been evaluated by Cyclic Voltammetry and AC impedance spectroscopy. It has been found that charge transfer density improves as NiO becomes lithiated and enhancement of lithium diffusion coefficient with increase of x in Li_xNiO is mainly responsible for it.

초 연약점토에 대한 침투압의 적용성 연구

李松,具慈甲,李揆丸,黃圭鎬 서울시립대학교 산업기술연구소 1994 산업기술연구소논문집 Vol.2 No.-

This Paper describes laboratory experiments about the behavior of dredged material during thesettlement, self-weight consolidation and the effect of seepage consolidation in sea water. By the result of this study, it can be concluded that the strength of soil and water content after self weight consolidation are little influence by the initial water contents. And, dredged material soil including clayer silt also have been influence little by the salt content. When the seepage force was added on the specimen surface after several days self weight consolidation, the consolidation effect and density were increased. Seepage consolidation effect was achieved in relatively short time and by knowing the consolidation characteristics, the consolidation constant were determined. After seepage consolidation, the unconfined compression strength was about 0.05kg/cm2, which is the enough strength to hold the sand mat in the field. RI instrument was used to measured the density and the water content of the material in column.